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Silicon micro needle surface coating process method based on micro-electromechanical system (MEMS) technology

A processing method and needle surface technology, applied in the field of silicon microneedle surface coating processing based on MEMS technology, can solve problems affecting mechanical properties, uneven thickness of silicon needles, biocompatibility and reliability, and achieve good Effects of biocompatibility and enhanced reliability

Inactive Publication Date: 2011-02-16
SHANGHAI JIAO TONG UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] Found through literature search to prior art, the Chronic neural recordings using silicon microelectrode arrays electrochemically deposited with a poly(3,4-ethylenedioxythiophene) (PEDOT) film published by Kip A Ludwig et al. of Michigan University in 2006 Chemically deposited polyethylene dioxythiophene film modified silicon microelectrode array for long-term neural signal recording) in the method of deep diffusion of concentrated boron to make the main body of silicon microneedles, resulting in uneven thickness of silicon needles and affecting its mechanical properties
And the surface is SiO 2 Materials, biocompatibility and reliability for in vivo work are affected

Method used

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  • Silicon micro needle surface coating process method based on micro-electromechanical system (MEMS) technology
  • Silicon micro needle surface coating process method based on micro-electromechanical system (MEMS) technology
  • Silicon micro needle surface coating process method based on micro-electromechanical system (MEMS) technology

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Embodiment 1

[0025] In this embodiment, the surface insulating layer is fabricated by spin-coating polyimide. Polyimide material has good biocompatibility and water resistance. Coating it on the surface of silicon material can enhance the reliability of silicon microneedle working in vivo and realize long-term implantation in vivo.

[0026] Example 1

[0027] like figure 1 As shown, this embodiment includes the following steps:

[0028] Step 1, cleaning the SOI sheet 1, using the SOI sheet 1 as the substrate, and growing the bottom layer on the polished surface of the SOI sheet 1 by PECVD (plasma chemical vapor deposition) method Bottom SiO 2 2 for electrically isolating the metal alloy layer from the silicon substrate, such as figure 1 (a) shown.

[0029] Step 2, on the bottom SiO 2 2 sputtering metal sequentially titanium and Gold, forming a metal alloy layer, and etching out metal interconnection lines 10, pads 9 and contact dots 11, pads 9 are used to electrically connect mi...

Embodiment 2

[0038] like figure 1 As shown, this embodiment includes the following steps:

[0039] Step 1, cleaning the SOI sheet 1, using the SOI sheet 1 as the substrate, and growing the bottom layer on the polished surface of the SOI sheet 1 by PECVD (plasma chemical vapor deposition) method Bottom SiO 2 2 for electrically isolating the metal alloy layer from the silicon substrate, such as figure 1 (a) shown.

[0040] Step 2, on the bottom SiO 2 2 sputtering metal sequentially titanium and Gold, forming a metal alloy layer, and etching out metal interconnection lines 10, pads 9 and contact dots 11, pads 9 are used to electrically connect microelectrodes and external circuits, and contact dots 11 are used as stimulation points , used to stimulate tissues to transmit electrical signals, such as figure 1 (b) shown.

[0041] Step 3, PECVD growing the top layer on the metal alloy layer For insulating metal alloy layer, use buffered HF acid solution to etch top layer SiO 2 , expos...

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Abstract

The invention relates to a silicon micro needle surface coating process method based on a micro-electromechanical system (MEMS) technology, which comprises the following steps: adopting a chemical vapor deposition method to grow a bottom layer SiO2 on a burnishing surface of a silicon wafer for electrically isolating metal alloy layer and a silicon base; sputtering titanium element and gold element on the bottom layer SiO2 in sequence to form a metal alloy layer; respectively etching metal interconnection line, a pressure welding spot and a contact round dot on the metal alloy layer; growing a top layer SiO2 on the metal alloy layer for insulating the metal alloy layer; etching the top layer SiO2 with HF acid solution to expose the pressure welding spot and the contact round dot on the metal alloy layer; coating and photoetching polymer on the front surface of the silicon base to expose the pressure welding spot and pole contact points on the metal alloy layer; and etching and removing the bottom layer SiO2 and the base by using an inductive coupling plasma dry etching method. The micro needle in the invention has biocompatibility and waterproofness, can enhance the reliability during in vivo operation after being coated on the surface of the silicon material, and can be implanted for a long time.

Description

technical field [0001] The invention relates to a method in the technical field of micro-electro-mechanical systems, in particular to a method for coating and processing the surface of a silicon microneedle based on a MEMS process. Background technique [0002] Vision is an important way for human beings to understand the objective world. More than 70% of the information the brain needs comes from vision. Vision loss caused by various retinopathy has become the most serious disability affecting the quality of human life. Through the in-depth study of optic nerve damage and repair mechanisms, the basic theory and key scientific issues of visual function restoration, and the development of visual prostheses are expected to open up a new way for blind people to regain their sight. A visual prosthesis is an artificial organ that can process and encode image information, and stimulate the visual nervous system through a microelectrode array, thereby generating artificial vision...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B81C1/00
CPCA61N1/0543A61N1/0541A61N1/0551A61N1/3605
Inventor 隋晓红柴新禹任秋实沈念
Owner SHANGHAI JIAO TONG UNIV