Method for processing tail gas and dust generated by producing trichlorosilane

Abstract

The invention relates to a method for producing trichlorosilane and equipment thereof, in particular to a processing method of dust generated in the producing process of trichlorosilane and equipment thereof. The mixture of the tail gas and the dust in the producing process of the trichlorosilane is processed through a filtering device, the intercepted dust is then processed through a bag filter in two steps, at least one cloth-bag blowing pipe for blowing out nitrogen is arranged in the bag filter for processing the dust, and the cloth-bag blowing pipe comprises a main pipe, a branch pipe and at least one nozzle, wherein the main pipe is arranged at the bottom or the top of the filter, a branch pipe is installed on the main pipe and is parallel between filtering bags and the nozzle is arranged on the branch pipe; and at least one dust blowing pipe is arranged at the dust inlet of the bag filter, the dust blowing pipe is used for blowing out the nitrogen, and the dust is deposited at the bottom of the bag filter after being blown dispersedly. The processing method of the tail gas and the dust of the invention can realize continuous operation, saves the usage amount of the nitrogen, reduces the discharge of pollutants, and can be used for producing byproducts containing ammonium chloride.

Description

technical field [0001] The invention relates to a method and equipment for producing trichlorosilane, in particular to a method and equipment for treating tail gas dust in the production process of trichlorosilane. Background technique [0002] Trichlorosilane is an organosilicon monomer with a wide range of uses. It is mainly used as a raw material for the production of semiconductor silicon, single crystal silicon and polycrystalline silicon. It is widely used in various fields of national defense, national economy and even people's daily life. Trichlorosilane is also An important raw material for the production of silane coupling agents and other organosilicon compounds. [0003] Due to the needs of environmental protection, it is necessary to treat the waste gas produced in the production process of trichlorosilane, which can reduce pollution, and recycle and reuse the components in the waste gas, which not only reduces the production cost of the enterprise, but also red...

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Problems solved by technology

[0004] In the production process of trichlorosilane, after condensation treatment in the tail gas produced, there are still a small amount of trichlorosilane, silicon tetrachloride, hydrogen chloride and unreacted silicon powder in the tail gas. Pass the tail gas through a bag filter to intercept the dust. However, due to the small dust particles of silicon powder and the large void ratio, a certain amount of hydrogen chloride gas will be mixed in the dust, which has a strong hydrogen chloride smell. If the dust is not further processed processing will cause air pollution, for this reason, the present invention proposes the following technical solutions

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