Micro gas chromatographic column with high depth-to-width ratio and wet corrosion manufacturing method thereof

Abstract

The invention discloses a micro gas chromatographic column with high depth-to-width ratio and a wet corrosion manufacturing method thereof. In the micro gas chromatographic column, a broken line chromatographic groove is formed on a (110) single crystal silicon substrate, the included angle of the long and short edges of the broken line is 70.53 degrees, and the long and short edges are along the (110) and (112) crystal directions of the substrate respectively. Vertical deep grooves with high depth-to-width ratio are formed by adopting an anisotropic wet corrosion method in the broken line chromatographic column and bonded by silicon glass bonds, so that the whole broken line groove has high depth-to-width ratio; and long enough column length is realized in a small area. On the characteristic dimensions of depth-to-width ratio, column length, area and the like, the broken line deep groove is equivalent to a vertical deep groove processed by deep reactive ion etching (DRIE); and the adopted wet corrosion processing method is simple and feasible, expensive DRIE etching equipment is not needed, and the processing cost is greatly reduced.

Description

technical field [0001] The invention relates to the technical field of gas chromatography, in particular to a micro gas chromatography column with high aspect ratio and a manufacturing method thereof by wet etching. Background technique [0002] Gas chromatography is a technology for separating and identifying mixed gases. It was invented as early as the 1950s and is widely used in the fields of pharmaceuticals, oil exploration, environmental monitoring, material purification, and conventional organic compound analysis. [0003] A gas chromatograph is generally composed of a sample injector, a separation column, and a detector. The key component is the separation column, which determines the separation effect of the chromatograph. Traditional chromatographs mostly use quartz capillary as the separation column, and the inner wall of the separation column is coated or filled with a stationary phase. When the components of the mixture pass through the column with the carrier g...

AI Technical Summary

Problems solved by technology

However, dry etching requires special equipment and is expensive

As for the low-cost wet processing method, only the University of Cincinnati in the United States has achieved a simple straight-shaped deep groove structure, but its column length is only 3cm, which seriously affects the separation efficiency.

The general requirement of micro-chromatography is to achieve the highest possible chromatographic separation effect in a volume as small as possible. The straight structure will not bend or twist. Even if the length is increased, it will not meet the requirements of miniaturization.

However, the spiral and loop patterns commonly used in dry etching cannot obtain deep groove structures in wet etching.

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