A kind of preparation method of double-structure suede transparent conductive electrode
A technology of transparent conductive electrodes and transparent conductive films, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of pollution, difficult to ensure the yield of industrial production, difficult CIGS co-deposition process, etc. Effect
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[0023] In the following, the present invention will be further described through embodiments with reference to the accompanying drawings.
[0024] A method for preparing double-structure suede transparent conductive electrode, the specific manufacturing process is as follows:
[0025] ①First, the ultra-white float glass substrate to be coated is sent to the glass washing machine for cleaning, and the clean ultra-white float glass substrate 1 is sent to the magnetron sputtering machine, and the background vacuum of the coating chamber reaches 2× 10 -4 Pa, in a 0.3Pa high-purity argon environment, a TCO transparent conductive film 2 is deposited on a glass substrate by magnetron sputtering, the substrate temperature is 150°C, and the deposited film thickness is 1000nm;
[0026] ②Wet etch the prepared TCO transparent conductive film 2, using dilute hydrochloric acid as the etching solution, concentration 0.5%, temperature 20°C, etching time 45s, and the glass substrate deposited with th...
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