A kind of preparation method of double-structure suede transparent conductive electrode

Abstract

The invention relates to a method for preparing a transparent conductive electrode with a dual-structure texture surface, and belongs to the technical field of manufacturing of thin film solar cells. The method comprises the following steps of: preparing a transparent conductive oxide (TCO), namely a TCO transparent conductive thin film (2) on a substrate (1) by a thin film deposition technology;etching the surface of the thin film by a wet etching method; changing process parameters to obtain a large-size surface texture, namely a TCO thin film (3) of the surface texture; depositing a BZO transparent conductive thin film (4) on the surface of the TCO thin film of the surface texture by a coating technology; and adjusting the deposition parameter of the BZO transparent conductive thin film to obtain a small-size surface texture, so the whole transparent electrode has the dual-structure surface texture. The electrode is applied to a thin film solar cell, visible light and near infrared light can be effectively scattered, and the full utilization range of the cell for a solar spectrum is expanded.

Description

technical field [0001] The invention relates to a method for preparing a double-structure suede transparent conductive electrode, which belongs to the technical field of thin-film solar cell manufacturing. Background technique [0002] In the 21st century, the contradiction between the explosive growth of human energy demand and the depletion of fossil energy supply has become increasingly prominent, and the global competition for energy has become increasingly fierce. Solar energy is known as the most ideal green energy, and it is an inexhaustible clean energy. The application prospect of solar cells is very broad. Among various solar cells, thin-film solar cells occupy an important position because of their advantages of low cost and low material consumption. Thin-film solar cells mainly include thin-film silicon solar cells, cadmium telluride thin-film solar cells, copper indium gallium selenide (CIGS) and polycrystalline silicon thin-film solar cells. Among these types...

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Problems solved by technology

Among these types of thin film batteries, cadmium in cadmium telluride thin film batteries has strong pollution to the environment, which deviates from the original intention of developing solar cells; CIGS thin film solar cells have an experimental efficiency of 20.3%, which is close to the highest efficiency of polycrystalline silicon cells , but the co-deposition process of CIGS is very difficult, and it is difficult to guarantee the yield rate of industrial production; and selenium, indium, gallium, tellurium, etc. are relatively rare elements, which will greatly restrict the mass production of this battery. Mature products are thin-film silicon solar cells

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