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Microspherical film preparation device and method of preparing boron carbide microspherical film and pellet by vacuum evaporation technique

A technology of thin film preparation and boron carbide, which is applied in the direction of vacuum evaporation plating, ion implantation plating, metal material coating technology, etc., can solve the problems of reducing the deposition rate of the film material and the surface damage of the film layer, so as to increase the deposition rate, The effect of uniform thickness and smooth inner and outer surfaces

Inactive Publication Date: 2013-07-31
SICHUAN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Although this method and device are an innovation in the preparation of microsphere boron carbide films and have beneficial technical effects, during the coating process, due to the collision between the microsphere substrates, the microsphere substrate and the screen Collisions will occur between the walls of the rebounding disk, which will cause a certain degree of damage to the surface of the film layer. On the other hand, the vapor flow of the film material must pass through the screen before it can be deposited on the microsphere substrate. The existence of the screen blocks some Film material vapor flow, thus reducing film deposition rate

Method used

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  • Microspherical film preparation device and method of preparing boron carbide microspherical film and pellet by vacuum evaporation technique
  • Microspherical film preparation device and method of preparing boron carbide microspherical film and pellet by vacuum evaporation technique
  • Microspherical film preparation device and method of preparing boron carbide microspherical film and pellet by vacuum evaporation technique

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0035] In this embodiment, the structure of the magnetic adsorption microsphere film preparation device is as follows figure 1 As shown, it includes a motor 1, a tie rod 2, a fixed disk 3, a magnet 4 and a screen cloth 5. The motor 1 is a model 80YYJP25-3 motor, the tie rod 2 is three, made of steel wire with a diameter of 1mm, the fixed plate 3 is a circular plate made of paulownia or polytetrafluoroethylene, and the magnet 4 is a samarium-cobalt magnet. 2.10×4.10×7.20mm 3 , the distance between adjacent magnets L≥20mm, the magnets 4 are installed on the fixed plate 3 and distributed at equal intervals, such as figure 2 As shown, the screen is 300 mesh stainless steel screen. The assembly method of each component and the installation position in the vacuum coating equipment are as follows: image 3 As shown: one end of each tie rod is connected with the rotating part of the motor 1 and distributed at equal intervals along the circumference of the motor rotating part, the ...

Embodiment 2

[0038] Boron carbide thin films were deposited on the ferromagnetic microsphere substrate at different rolling speeds (that is, at different positions).

[0039] (1) Preparation of microsphere substrate and film material

[0040] The ferromagnetic microsphere substrate used was provided by Zhejiang Shangyu Yuanyuan Steel Ball Co., Ltd., with a diameter of 1 mm. The ferromagnetic microsphere model was 440C, and the microsphere grade was 16.

[0041] The boron carbide film material used is granular (the particle size is about 3mm), and the purity is 99.5%, which is provided by Jiangxi Haite New Material Co., Ltd.

[0042] (2) Coating

[0043] The boron carbide film material is placed in the crucible of the electron beam evaporation equipment, and the ferromagnetic microsphere substrate 6 with a ball diameter of 1mm after cleaning and drying is adsorbed under the screen cloth 5 of the magnetic adsorption microsphere film preparation device and combined with The screen is in con...

Embodiment 3

[0046] (1) Preparation of microsphere substrate and film material

[0047] The used ferromagnetic microsphere substrate and boron carbide film material are the same as in Example 2.

[0048] (2) Coating

[0049] The boron carbide film material is placed in the crucible of the electron beam evaporation equipment, and the ferromagnetic microsphere substrate 6 with a ball diameter of 1mm after cleaning and drying is adsorbed under the screen cloth 5 of the magnetic adsorption microsphere film preparation device and combined with The screen is in contact so that the ferromagnetic microsphere substrate is located 30 cm above the crucible; close the vacuum chamber and evacuate to 3×10 -3 Pa, turn on the power switch and filament switch on the electric control cabinet in order, adjust the filament current at 0.3A, and warm up for 10 minutes; turn on the deflection and focus switches, select the high voltage as 6kV, adjust the beam current to 5mA, and adjust the deflection X axis, Y ...

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Abstract

A magnetic adsorption microspherical film preparation device comprises a motor, a tie bar, a fixed tray, a magnet and a screen. A method of preparing a microspherical boron carbide film adopts an electron beam evaporation device provided with the magnetic adsorption microspherical film preparation device and comprises the following steps: (1) placing the boron carbide film into a crucible of the electron beam evaporation device and adsorbing a ferromagnetic microspherical lining under the screen and contacting the screen to ensure the ferromagnetic microspherical lining to be arranged at 20-30cm right above the crucible; (2) coating film under the vacuum condition, wherein the temperature of the lining is the room temperature to 300 DEG C; and (3) controlling the beam value at 80-100mA while coating film, wherein the rotating frequency of the screen is 0.001-0.01Hz and the coating time is within the limit when the thickness of the film meets the requirement. A method of preparing a boron carbide hollow pellet comprises the steps of opening a hole on the surface of the microspherical boron carbide film with the ferromagnetic microsphere as the lining under the constant pressure and900-1000 DEG C after annealing treatment and exposing the iron core lining, and then laying into the diluted sulphuric acid solution for corroding for at least 24 hours.

Description

technical field [0001] The invention belongs to the field of thin film preparation, and in particular relates to a microsphere thin film preparation device suitable for electron beam evaporation technology and a method for preparing microsphere boron carbide thin film and target pellets by electron beam vacuum evaporation technology. Background technique [0002] In the experimental research of inertial confinement fusion, deuterium-tritium fuel needs to be packed into a hollow spherical container, which is called a target pellet. The principle of fusion puts forward high requirements on the ablation layer of the target pellet (microsphere film), such as high sphericity, smooth inner and outer surfaces, uniform wall thickness, and the diameter of the target pellet is 1-2 mm. Boron carbide is one of the important materials for preparing high-gain fuel pellets for inertial confinement fusion. Due to the high hardness, high melting point and poor flexibility of boron carbide ma...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/50C23C14/06
Inventor 廖志君林涛于小河王自磊陶勇卢铁城伍登学
Owner SICHUAN UNIV