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Method for preparing double-component and double-layer nano lubrication thin film by taking nano-particle array as template

A nanoparticle array, lubricating thin film technology, applied in coating, manufacturing microstructure devices, metal material coating process, etc., can solve problems such as adhesion, affecting operation and service life, micro-friction, etc., to overcome agglomeration and expand use. , the effect of improving the carrying capacity

Active Publication Date: 2012-07-18
GUANGXI UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the huge specific surface area makes the moving parts of MOEMS / NOEMS have problems such as serious adhesion and micro-friction during operation, which directly affect its normal operation and service life

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0021] Preparation of a single-component self-assembled bilayer thin film of valeric acid on the surface of aminated single crystal silicon

[0022] First soak the single crystal silicon surface of the single crystal silicon wafer in the piranha solution (by H 2 o 2 and concentrated H 2 SO 4 According to the volume ratio of 3:7 preparation), the hydroxylation was carried out, the temperature was controlled at 90 ° C, and the duration was 30 minutes; the hydroxylated single-crystal silicon wafer was taken out, ultrasonically cleaned in ethanol and acetone solutions in turn, and then blown dry with nitrogen; After drying, the hydroxylated monocrystalline silicon wafers were quickly soaked in a solution of triethoxysilane coupling agent with a concentration of 5mM for amination, and the duration was 24 hours. They were taken out and ultrasonically cleaned in ethanol and acetone solutions in turn; the amination surface The final monocrystalline silicon wafer was immersed in a s...

Embodiment 2

[0026] Preparation of a single-component self-assembled bilayer thin film of lauric acid on the surface of aminated single crystal silicon

[0027] First soak the single crystal silicon surface of the single crystal silicon wafer in the piranha solution (by H 2 o 2 and concentrated H 2 SO 4 According to the volume ratio of 3:7 preparation), the hydroxylation was carried out, the temperature was controlled at 90 ° C, and the duration was 30 minutes; the hydroxylated single-crystal silicon wafer was taken out, ultrasonically cleaned in ethanol and acetone solutions in turn, and then blown dry with nitrogen; After drying, the hydroxylated monocrystalline silicon wafers were quickly soaked in a solution of trimethoxysilane coupling agent with a concentration of 5mM for amination. The duration was 24 hours, and they were taken out and ultrasonically cleaned in ethanol and acetone solutions in turn; after amination of the surface The monocrystalline silicon wafer is immersed in ...

Embodiment 3

[0031] Preparation of a single-component self-assembled bilayer thin film of lauric acid on the surface of aminated single crystal silicon

[0032] First soak the single crystal silicon surface of the single crystal silicon wafer in the piranha solution (by H 2 o 2 and concentrated H 2 SO 4 According to the volume ratio of 3:7 preparation), the hydroxylation was carried out, the temperature was controlled at 90 ° C, and the duration was 30 minutes; the hydroxylated single-crystal silicon wafer was taken out, ultrasonically cleaned in ethanol and acetone solutions in turn, and then blown dry with nitrogen; After drying, the hydroxylated monocrystalline silicon wafers were quickly soaked into a trichlorosilane coupling agent solution with a concentration of 5 mM for amination, and the duration was 24 hours. They were taken out and ultrasonically cleaned in ethanol and acetone solutions in turn; Use the pulling method to immerse the single crystal silicon wafer in the gold so...

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PUM

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Abstract

The invention discloses a method for preparing a double-component and double-layer nano lubrication thin film by taking a nano-particle array as a template. The double-component and double-layer nano lubrication thin film is prepared on the surface of hydroxylated monocrystalline silicon by taking the nano-particle array as the template according to a liquid phase method and a gas phase method; and components of the double-component and double-layer nano lubrication thin film can be controlled according to the concentration of a nano-particle solution or a lifting speed. The prepared double-layer nano film consists of a self-assembly film formed on the surface of the monocrystalline silicon by bonding alkyl carboxylic acid with high lubrication performance and perfluorocarboxylic acid through a chemical key so as to be integrated with the dual advantages of the long service life of the alkyl carboxylic acid and the surface antisticking performance of the perfluorocarboxylic acid; therefore, the obtained double-component and double-layer nano lubrication thin film has relatively high friction performance and high lubrication; the bearing capacity, the antisticking performance and the anti-abrasion performance of the single self-assembly single-molecule film are improved greatly; and the application of the self-assembly single-molecule film is expanded.

Description

technical field [0001] The invention relates to a self-assembled nano lubricating film, in particular to a method for preparing a two-component double-layer nano lubricating film with a nanoparticle array as a template. Background technique [0002] In the past two decades, micro-nano-opto-electromechanical systems (MOEMS / NOEMS) have achieved rapid development due to their lower cost and excellent performance. With the advancement of modern science and technology, people are constantly pursuing micro-devices with small scale and perfect performance to meet the requirements in the fields of information, biology, environment, medicine, aerospace and smart weapons. These trends have a profound impact on the development of modern manufacturing science and technology. However, the huge specific surface area makes the moving parts of MOEMS / NOEMS have problems such as serious adhesion and micro-friction during operation, which directly affect its normal operation and service life....

Claims

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Application Information

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IPC IPC(8): C04B41/45B81C1/00
Inventor 莫宇飞黄福川卢朝霞杨茂立
Owner GUANGXI UNIV
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