Silicon wafer-cutting waste slurry recovery method
A recycling method and a technology for cutting silicon wafers, which are applied in the directions of silicon carbide, carbide, lubricating compositions, etc., can solve the problems of large amount of waste water, consumption of fluoride ions, high pollution, etc. The effect of the environment
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[0020] Step 1. Pretreatment:
[0021] Use a pump to send the original mortar and water to the mortar mixing tank at a volume ratio of 2:3, perform effective and uniform stirring for 30 minutes, and then send the feed pump to the first-stage filter press for solid-liquid separation. The solids form a filter cake and stay On the filter plate, the liquid is sent to the solid-liquid separation tank.
[0022] Step 2: Recovery of polyethylene glycol:
[0023] The liquid in the solid-liquid separation tank is transported to the particle-removing filter press through a pump, and the filter press is cycled for 10-15 minutes. During the cycle, samples are taken from the tap of the filter press to observe the particles in the filtrate. If no small particles are visible, stop the cycle. If the filtrate is still turbid after circulating for 15 minutes, stop the circulation, loosen the filter plate to clean the filter cloth and continue to filter until the filtrate is qualified, and the qualifie...
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