Preparing method for transparent conductive oxide film
An oxide film, transparent and conductive technology, applied in circuits, electrical components, semiconductor devices, etc., can solve the problems of black products, large liquid volume, residual pores, etc., to achieve strong adhesion, good film uniformity, and transparency. Good results
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[0011] An embodiment of the present invention provides a method for preparing a transparent conductive oxide film, which includes the following steps:
[0012] Step 1. Obtain a sol solution of zinc salt or indium salt and doped metal salt, wherein the viscosity of the sol solution is 15-20 mPa·s, and the concentration of zinc or indium in the zinc salt or indium salt is 0.1-1 mol / L , The molar ratio of zinc to doped metal is 0.001 to 0.03, and the molar ratio of indium to doped metal is 0.05 to 0.15;
[0013] Step 2: Immerse the film-forming medium into the sol solution, stay for 1-30s, and then pull the medium out of the sol liquid surface at a speed of 1-300cm / min, and then at 80°C-300° Keep at C for 0.5~30min, cool;
[0014] Step three: Repeat step two until the film thickness on the film-forming medium reaches the required thickness to obtain the transparent conductive oxide film.
[0015] Specifically, in step S01, when the zinc salt is mixed with the doped metal salt to prepare...
Example Embodiment
[0030] Example 1:
[0031] The zinc acetate dihydrate (Zn(AC) 2 ·2H 2 O) Dissolve in isopropanol, add diethanolamine (DEA) in an equimolar ratio with zinc acetate dihydrate, place it in a 70°C water bath, and stir for 1 hour to form a transparent and homogeneous solution A. Prepare Al 3+ Ion-doped solution, first make aluminum nitrate nonahydrate (Al(NO 3 ) 3 ·9H 2 O, analytically pure) was dissolved in absolute ethanol to prepare a transparent solution B with a concentration of 0.2 mol / L. Drop B solution into A solution, control the molar ratio of Al and Zn to 0.02, and add isopropanol to adjust the zinc acetate concentration of the solution to 0.5 mol / L. Then, after fully stirring at 70°C for 2 hours, a transparent and homogeneous solution is formed, which is poured into a clean jar and allowed to stand for 24 hours to obtain a sol solution for use.
[0032] Select the optical glass sheet, the size of the glass sheet is 25mm×80mm×1mm. Insert the cleaned glass sheet vertically i...
Example Embodiment
[0034] Example 2:
[0035] Dissolve indium nitrate in acetylacetone, then add methyl ethyl ether equal to the molar ratio of indium nitrate, place it in a water bath at 90°C, and stir for 1.5h to form a transparent and homogeneous solution A. Prepare Sn 2+ For the ion-doped solution, first dissolve tin nitrate in absolute ethanol to make a transparent solution B with a concentration of 0.5 mol / L. Drop B solution into A solution, control the molar ratio of Sn and In to 0.1, add isopropanol to adjust the indium nitrate concentration of the solution to 0.5 mol / L. Then, after fully stirring for 2 hours at 90°C, a transparent and homogeneous solution is formed, which is poured into a clean jar and allowed to stand for 24 hours to obtain a sol solution for use.
[0036] The stainless steel foil is selected, and the specification of the stainless steel foil is 80mm×80mm×0.5mm. The cleaned stainless steel foil is inserted vertically into the prepared sol, the substrate stays in the sol f...
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