Micro atomic cavity subjected to negative pressure forming, micro atomic clock chip and preparation method for micro atomic cavity and micro atomic clock chip

Abstract

The invention discloses a micro atomic cavity subjected to negative pressure forming, a micro atomic clock chip and a preparation method for the micro atomic cavity and the micro atomic clock chip. The method comprises the following steps of: etching a deep groove to form a silicon die; performing anodic bonding on the silicon die and a borosilicate glass assembled wafer under vacuum to form a sealed cavity; heating the wafer to temperature higher than glass transition temperature, preserving heat, cooling, and performing stress relief annealing on the wafer; putting a substance necessary to an atomic clock into the formed glass micro cavity, pre-bonding the glass micro cavity and a silicon substrate at room temperature in nitrogen atmosphere to seal the glass micro cavity, keeping pressure, and performing anodic bonding to obtain a sealed glass atomic cavity; corroding, and removing the silicon die to obtain a micro atomic cavity with straight vertical sides; preparing heaters on the borosilicate glass assembled wafer at the periphery of the glass micro cavity, and assembling components at the corresponding positions of the borosilicate glass assembled wafer; and preparing pins, and connecting the pins, a power supply and a processing circuit. The method is simple and low in cost.

Description

technical field [0001] The invention designs a MEMS (micro-electro-mechanical system) manufacturing technology, and in particular relates to a negative-pressure forming miniature atomic cavity, a miniature atomic clock chip and a preparation method. [0002] Background technique [0003] At present, atomic clocks are the most accurate artificial clocks, and the accuracy of atomic clocks can reach one billionth of a second or even higher. A special type of quantum transition in atomic clocks is the hyperfine transition, which involves the interaction of the nuclear magnetic field of the atom and the magnetic field of the electrons outside the nucleus. In principle, the principle of atomic clocks is basically clear, and there are two main directions for current development: one is to improve the performance of atomic clocks in terms of accuracy; the other is to miniaturize them while ensuring their performance. Currently, the world's most accurate atomic clock is in Colorado...

AI Technical Summary

Problems solved by technology

The problem with this design method is that the assembly is more complicated, and the design requirements for the reflective surface are higher, so the cost is higher

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