Polyaniline/ titanium dioxide nanometer composite impedance type thin film gas sensor and preparation method thereof

A gas sensor and titanium dioxide technology, applied in the field of sensors, can solve the problems of inappropriate control of the contact between the sensitive film and the sensor substrate, the inability to reuse conductive polymer residues, and the thickness of the sensitive film of the gas sensor, so as to facilitate the response sensitivity and promote the charge Migration, effects on response sensitivity and response speed

Inactive Publication Date: 2013-01-09
ZHEJIANG UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, the above method has defects such as difficult control of the preparation process and poor consistency of the prepared components. The sensitive film of the gas sensor prepared by this method is usually thick (several microns to hundreds of microns), and there are a large number of conductive polymers that cannot be

Method used

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  • Polyaniline/ titanium dioxide nanometer composite impedance type thin film gas sensor and preparation method thereof
  • Polyaniline/ titanium dioxide nanometer composite impedance type thin film gas sensor and preparation method thereof
  • Polyaniline/ titanium dioxide nanometer composite impedance type thin film gas sensor and preparation method thereof

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preparation example Construction

[0068] The present invention also provides a method for preparing a polyaniline / titanium dioxide nanocomposite impedance thin-film gas sensor, comprising the following steps:

[0069] 1) Deposit interdigitated gold electrodes 2 on the surface of ceramic substrate 1 by evaporation or photolithography to prepare ceramic substrate 1 with interdigitated gold electrodes;

[0070] 2) processing the ceramic substrate 1 with interdigitated gold electrodes to obtain a modified ceramic substrate 1 with interdigitated gold electrodes;

[0071] 3) Deposit polyaniline / titanium dioxide layer-by-layer electrostatic self-assembled composite film 5 on the modified ceramic substrate 1 with interdigitated gold electrodes;

[0072] 4) Deposit a polyaniline layer 6 on the polyaniline / titanium dioxide layer-by-layer electrostatic self-assembled composite film 5 to prepare a polyaniline / titanium dioxide nanocomposite resistive thin film gas sensor.

[0073] The number of interdigitated gold electro...

Embodiment 1

[0076] (1) Deposit 5 pairs of interdigitated gold electrodes 2 with a width of 200 μm and an interdigital gap of 200 μm by evaporation on the surface of the ceramic substrate 1 to obtain a ceramic substrate 1 with interdigitated gold electrodes;

[0077] (2) with Piranha solution (from 7 parts by volume of concentrated sulfuric acid (H 2 SO4) and 3 parts of 30% hydrogen peroxide (H 2 o 2 ) consists of) soaking the ceramic substrate with interdigitated gold electrodes at room temperature for 30 minutes, rinsing with deionized water for 2 minutes, and drying with nitrogen;

[0078] (3) Immerse the dried ceramic substrate 1 with a concentration of 2%wt in an aqueous solution of polydimethyldiallylammonium chloride for 5 minutes, take it out and rinse it with deionized water for 1 minute and dry it with nitrogen;

[0079] (4) Immerse the dried ceramic substrate 1 prepared in step (3) into sodium polystyrene sulfonate with a concentration of 2%wt for 10 minutes, take out and rins...

Embodiment 2

[0089] Step (9): Repeat step (7) and step (8) 5 times in sequence, and the remaining conditions are the same as in Example 1.

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Abstract

The invention discloses a polyaniline/ titanium dioxide nanometer composite impedance type thin film gas sensor and a preparation method thereof. The gas sensor comprises a ceramic base body, an interdigital gold electrode and a gas-sensitive thin film. The gas-sensitive thin film is composed of a polyaniline/ titanium self-assembly layer and a polyaniline layer, wherein the polyaniline/ titanium self-assembly layer can greatly improve response sensitivity of the sensor to gas under room temperature, accelerates response and improves stability, and the polyaniline layer can reduce impedance of elements well. The gas sensor has high response sensitivity to ammonia gas under the room temperature, has extremely good responding performance, responds quickly, is good in stability, and can be widely applied to accurate measurement and control of ammonia gas concentration in the industrial and agricultural production process and the atmospheric environment. The invention further provides the method for preparing the gas sensor. The method is simple in process, low in cost and extremely suitable for mass production.

Description

technical field [0001] The invention relates to the field of sensors, in particular to a polyaniline / titanium dioxide resistance thin-film gas sensor and a preparation method thereof. Background technique [0002] Gas sensors are an important class of chemical sensors, which are widely used in storage, industrial production, process control, environmental monitoring, etc., and play an increasingly important role in the development of modern science and technology and people's lives, constantly pursuing high performance, Low cost, small size, etc. have become problems to be solved urgently in the sensor industry. In addition, the introduction and innovation of new materials and technologies have made it possible to solve these problems. [0003] Traditional gas sensor sensitive materials include inorganic semiconductor materials and organic conductive polymers. Inorganic semiconductor gas-sensing materials usually need to be used to detect gases under high temperature condi...

Claims

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Application Information

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IPC IPC(8): G01N27/12
Inventor 李扬杨慕杰林乾乾
Owner ZHEJIANG UNIV
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