Micro-flow control chip machining and detection experiment device based on digital micro-mirror device

A digital micromirror device, microfluidic chip technology, applied in the direction of measuring devices, microstructure devices, manufacturing microstructure devices, etc., can solve the problem of inability to realize real-time detection of microchannel pattern soft lithography exposure, inability to realize rapid processing and Real-time detection and other problems to achieve the effect of shortening the preparation cycle, convenient modification, and overcoming insufficient precision

Inactive Publication Date: 2013-03-13
UNIV OF SCI & TECH OF CHINA
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Problems solved by technology

[0003] The existing microfluidic chip processing and manufacturing technology does not combine the design process of the microfluidic channel with the manufacturing process well, and cannot realize the soft lithographic exposure of the microfluidic channel pattern and the control of the microfluidic chip...

Method used

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  • Micro-flow control chip machining and detection experiment device based on digital micro-mirror device

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specific Embodiment

[0030] The specific embodiment of the present invention is the preferred embodiment of basic embodiment, specifically as follows:

[0031]In this embodiment, the wavelength of the emitted light of the ultraviolet LED light source 1 is 365nm, and the spectral line width is 7.5nm; membrane. An ultraviolet LED beam expanding light source is jointly formed by the ultraviolet LED light source 1 and the first lenticular lens 2 . The beam diameter of the light source after beam expansion is about 10mm.

[0032] The size of the DMD device 4 is about 10*10mm, the dichroic mirror 5 can transmit ultraviolet light and reflect visible light; the first microscope objective lens 6 has a magnification of 10X, an effective focal length of 20mm, and is coated with a 325-500nm near-ultraviolet anti-reflection film . The DMD device 4, the dichroic mirror 5 and the first microscope objective lens 6 jointly constitute an image projection optical path.

[0033] The light wavelength produced by t...

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Abstract

The invention provides a micro-flow control chip machining and detection experiment device based on a digital micro-mirror device, comprising an ultraviolet LED (Light-Emitting Diode) light source, a first double-convex lens, a first reflection mirror, a DMD (Digital Micro-mirror Device), a dichroic mirror, a first microscope objective lens, a three-dimensional electric platform, a second microscope objective lens, a second double-convex lens, a white light LED light source, a second reflection mirror, a light filtering mirror, a third double-convex lens, a CCD (Charge Coupled Display) camera and a computer. The experiment device can effectively work at two modes of photoresist exposure and visible light and ultraviolet fluorescence detection of a micro-flow control chip; and the computer is respectively connected with an ultraviolet LED light source, the white light LED light source, the DMD, the a three-dimensional electric platform and the CCD camera. The micro-flow control chip machining and detection experiment device based on the digital micro-mirror device can realize soft photoetching exposure of a micro-flow-channel pattern in a manufacturing process of the micro-flow control chip and can also realize the real-time visible light and ultraviolet fluorescence detection of trace samples in the micro-flow control chip.

Description

technical field [0001] The invention belongs to the technical field of micromachining and microfluidic sample detection, and in particular relates to a novel experimental device for rapid processing of microfluidic chips and real-time detection of microfluidic samples based on a digital micromirror device (DMD). Background technique [0002] Since its appearance, microfluidic chips have played an important role in the fields of analytical chemistry, systems biology, biophysics, clinical medicine, and biopharmaceuticals. Microfluidic chip technology itself is constantly developing and improving in these applications. The manufacture and processing of microfluidic channels in microfluidic chips has expanded from the original microelectromechanical processing technology (such as chemical etching) in the field of microelectronics to new technologies such as photolithography and soft lithography. The detection of micro-sample in the microfluidic chip has also borrowed a large nu...

Claims

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Application Information

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IPC IPC(8): G01N21/17G01N21/64B81C1/00
Inventor 丁翔宇任煜轩卢荣德
Owner UNIV OF SCI & TECH OF CHINA
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