Radio frequency horizontal double-diffusion-field effect transistor and manufacturing method thereof
A field effect transistor, lateral double diffusion technology, used in semiconductor/solid state device manufacturing, semiconductor devices, electrical components, etc., can solve the problem of reducing the size of the output power, achieve low output capacitance, reduce ion implantation and photolithography process , the effect of easy control of doping concentration
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[0033] Such as figure 2 As shown, it is a schematic structural diagram of the radio frequency lateral double diffused field effect transistor of the present invention. A substrate doped with a high concentration of P-type impurities, that is, a P-type substrate 201, is used to grow P-type lightly doped on the P-type substrate 201. Heteroepitaxial layer 202, and then grow an N-type lightly doped epitaxial layer 203 on the P-type lightly doped epitaxial layer 202, and then grow a P-type heavily doped epitaxial layer 204 on the N-type lightly doped epitaxial layer 203. A layer of N-type heavily doped epitaxial layer 205 is grown on the heavily doped epitaxial layer 204; finally, a P-type polysilicon plug or metal plug 207 is formed by ion implantation and diffusion processes to form a P well 206, an oxide layer 208 and a polysilicon gate 210; Faraday The shielding layer 209, the P+ region 211, the N+ source region 212, and the N+ drain region 213. The epitaxy between the P well 2...
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