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145results about How to "Reduce photolithography process" patented technology

Preparation method of display panel, display panel, and display device

The invention discloses a preparation method of a display panel, the display panel, and a display device. The preparation method of the display panel comprises steps that a substrate is provided; a first electrode layer is disposed on the substrate; a first transparent electrode layer is disposed on the first sub-pixel region of the side of the first electrode layer away from the substrate by adopting a photolithography technology; second transparent electrode layers are disposed on the side of the first transparent electrode layer away from the substrate and the second sub-pixel region of the side of the first electrode layer away from the substrate; pixel definition layers are disposed between adjacent sub-pixel regions; an organic light-emitting structure layer is disposed on the second transparent electrode layers, a first electrode layer of a third sub-pixel region, and the pixel definition layers, and at least comprises an organic light-emitting layer; a second electrode layer is disposed on the side of the organic light-emitting structure layer away from the substrate. A problem of difficulty in realizing simultaneous enhancement of red light, green light, and blue light emitted by the display panel is improved, and the preparation technology of the display panel is simplified.
Owner:GUANG ZHOU NEW VISION OPTO ELECTRONICS TECH

Array substrate and manufacturing method therefor and display apparatus

The invention relates to an array substrate and a manufacturing method therefor and a display apparatus, and aims to solve the problem of a relatively complex manufacturing process of a TFT substrate, so that an effective mode for reducing photolithography techniques without lowering product yield is needed urgently. The manufacturing method comprises the steps of forming a gate metal layer pattern, a gate insulating layer thin film, an active layer pattern and source and drain metal layer patterns on a substrate; forming a planarization layer thin film, a first electrode layer pattern, a first insulating layer thin film and a photoresist pattern on the source and drain metal layer patterns in sequence; performing a dry etching process on the first insulating layer thin film and the planarization layer thin film in sequence, wherein via holes formed in the first insulating layer thin film, a first shielding electrode and the planarization layer thin film form a first through hole; and forming a second electrode layer pattern which comprises a first bridging electrode on the first insulating layer thin film, and enabling the first bridging electrode to at least fully cover the first through hole region and to be connected with the source and drain metal layer patterns.
Owner:SHANGHAI TIANMA MICRO ELECTRONICS CO LTD

Micro-hemispherical resonant gyroscope based on borosilicate glass annealing forming and manufacturing method thereof

The invention discloses a micro-hemispherical resonant gyroscope based on borosilicate glass annealing forming and a manufacturing method thereof. A silicon wafer serves as a substrate to form a silicon substrate. A cylindrical cavity and a center supporting column in the circle center of the cavity are etched on the upper surface of the silicon wafer. The center supporting column is connected with the center of a hemispherical harmonic oscillator to form a suspended structure. Meanwhile, eight flat-plate electrodes are evenly distributed around the hemispherical harmonic oscillator and on the periphery of the cylindrical cavity of the upper surface of the silicon wafer. The eight flat-plate electrodes are composed of four drive electrodes and four detection electrodes, all the drive electrodes, the detection electrodes and the hemispherical harmonic oscillator are not in contact and have same gaps, and the drive electrodes and the detection electrodes are sequentially distributed at intervals. The glass metal blowing type micro-hemispherical resonant gyroscope manufactured through the method has stable performance and a wider application range because of the advantages of being simple in structure, low in surface stress, high in symmetry and the like.
Owner:NANJING UNIV OF SCI & TECH

Liquid crystal display panel and liquid crystal display device

The invention provides a liquid crystal display panel and a liquid crystal display device, comprising a first substrate, a second substrate and a liquid crystal layer, wherein the first substrate and the second substrate are arranged opposite to each other, and the liquid crystal layer is clamped between two substrates, the first substrate comprises a plurality of pixel regions defined by a plurality of scanning lines and a plurality of data lines, and the pixel regions at least comprise a first sub-pixel electrode and a second sub-pixel electrode, a first film transistor and a second film transistor. The first sub-pixel electrode and the second sub-pixel electrode are electrically isolated from each other and the polarities of the first sub-pixel electrode and the second sub-pixel electrode are opposite when the liquid crystal display panel operates; the first sub-pixel electrode and the second sub-pixel electrode are nested with each other, wherein the first sub-pixel electrode is provided with at least one nesting region extending into the second sub-pixel electrode, and the second sub-pixel electrode is provided with at least one nesting region extending into the first sub-pixel electrode. The liquid crystal display panel saves photoetching process of a projection structure and a gap in the process of manufacturing a color filter substrate, simplifies the process, reduces the cost and improves the contrast ratio at the same time.
Owner:KUSN INFOVISION OPTOELECTRONICS

Micro-hemispherical resonator gyroscope based on borosilicate glass annealing forming and preparing method

The invention discloses a micro-hemispherical resonator gyroscope based on borosilicate glass annealing forming and a preparing method of the micro-hemispherical resonator gyroscope. A silicon wafer is used as a substrate to form a silicon substrate, a cylindrical cavity and a center supporting pillar in the circle center of the cavity are etched on the upper surface of the silicon wafer, and the center supporting pillar is connected with the center of a hemispherical resonator to form a suspension structure. Meanwhile, eight flat plate type electrodes are evenly distributed on the periphery of the cylindrical cavity in the upper surface of the silicon wafer and around the hemispherical resonator, and the eight flat plate type electrodes are composed of the four driving electrodes and the four detection electrodes. All the driving electrodes and all the detection electrodes are not in contact with the hemispherical resonator, identical gaps exist, and the driving electrodes and the detection electrodes are arranged in sequence alternately. The prepared glass metal blowing type micro-hemispherical resonator gyroscope has the advantages of being simple in structure, low in surface stress, high in symmetry and the like, and therefore the micro-hemispherical resonator gyroscope can have stable performance and a wider application range.
Owner:NANJING UNIV OF SCI & TECH

Display device, and method for producing array substrate for display device

Disclosed is a display device provided with: a plurality of stripe-shaped data electrodes (3) which are formed on a first substrate (1) and which extend in the vertical direction; a plurality of scanning lines (11) and a plurality of reference signal lines (12) which are formed on the second substrate (2) and which extend in the horizontal direction; a plurality of pixel electrodes (10) which are formed on the second substrate (2) and which are arranged in the form of a matrix; a plurality of switching elements (T1) which are formed on the second substrate (2), turns on or off by means of the plurality of scanning lines (11), and is disposed between the plurality of reference signal lines (12) and the plurality of pixel electrodes (10); and an oxide semiconductor layer (22) which is disposed between a source electrode (21) and a drain electrode (20). The oxide semiconductor layer (22) is formed with the switching elements (T1) with an insulating layer (23) therebetween in the vicinity of a gate electrode (11a), and is provided with the pixel electrodes (10) which are connected to the source electrode (21) or the drain electrode (20). The source electrode (21) or the drain electrode (20) that is connected to the pixel electrode (10) is formed from the same material as the pixel electrode (10). The source electrode (21) and the drain electrode (20) are formed from a film which was formed at the same time.
Owner:SHARP KK

Infrared detector structure with high filling factor and manufacturing method thereof

The invention discloses an infrared detector structure with a high filling factor. The structure comprises a micro-bridge structure arranged on a substrate, and the micro-bridge structure comprises amicro-bridge floor, a support and an electric connection hole. The micro-bridge floor is sequentially provided with a first release protection layer, an infrared sensitive layer, a first metal electrode layer and a second release protection layer from bottom to top; a second metal electrode layer and a third release protection layer are sequentially arranged on the surface of the inner walls of the support and the electric connection hole; the second metal electrode layer is led out from an opening at the top of the inner walls of the support and electric connection hole, and is electrically connected with the first metal electrode layer; the second metal electrode layer achieves the electrical connection with the substrate through the support and the bottom opening of the electric connection hole, and the third release protection layer is led out from the support and the upper end opening part of the inner wall of the electric connection hole and is connected with the second release protection layer. The structure can further improve the product performance while improving the filling factor. The invention further discloses a manufacturing method of the infrared detector structurewith the high filling factor.
Owner:SHANGHAI INTEGRATED CIRCUIT RES & DEV CENT

MIM capacitor and manufacturing method thereof

The invention provides an MIM capacitor and a manufacturing method thereof. The manufacturing method comprises the steps of providing a semiconductor substrate, and forming a first metal layer on thesemiconductor substrate; forming an anti-reflection layer on the first metal layer; photoetching and etching the first metal layer and the anti-reflection layer to define an MIM capacitor region, wherein the first metal layer in the MIM capacitor region serves as a lower pole plate of the MIM capacitor, and the anti-reflection layer in the MIM capacitor region serves as a dielectric layer of the MIM capacitor; and forming an upper pole plate of the MIM capacitor on the anti-reflection layer in the MIM capacitor region. According to the manufacturing method provided by the invention, the anti-reflection layer reserved in the etched area is used as a dielectric layer of the capacitor at the same time, the etched area is continuously filled with metal to serve as the upper pole plate, an additional capacitor dielectric layer does not need to be manufactured, an additional photoetching process is not needed for defining the upper pole plate area any more, and the photoetching and etching frequency is reduced, so that the process cost is reduced, and the process period is shortened.
Owner:CSMC TECH FAB2 CO LTD
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