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Surface metallization method for foamed plastic by adopting high-power pulse magnetron sputtering

A high-power pulsed, foamed plastic technology, applied in sputtering coating, metal material coating process, ion implantation coating and other directions, can solve the problems of poor film-base bonding performance, low coating quality, large residual stress, etc. It can achieve the effect of strong bonding force of film base, smooth and dense coating surface and wide variety of effects.

Active Publication Date: 2013-05-29
DALIAN UNIV OF TECH
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  • Summary
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  • Application Information

AI Technical Summary

Problems solved by technology

The ionization rate of traditional magnetron sputtering target particles is low, generally only 5 to 15%, resulting in low quality coatings deposited by magnetron sputtering. Large internal residual stress and poor bonding performance of film base

Method used

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Examples

Experimental program
Comparison scheme
Effect test

example 1

[0026] Example 1. A factory requires that a Cu film be deposited on a polyurethane foam workpiece with a deposition rate of 50nm / min and a target film thickness of 5 μm.

[0027] a) Surface pretreatment of foamed plastic workpieces

[0028] 1) Surface sealing treatment of foamed plastic workpieces: make metal profiling molds according to the shape of polyurethane foamed plastic workpieces, place the molds in a box-type resistance furnace and heat them to 150°C before taking them out, put the foamed plastics into the mold and put them into the resistance Take it out after heating in the furnace for 3 minutes.

[0029] 2) Surface cleaning: Use an organic cleaning agent to wipe and clean the polyurethane foam that has cooled to room temperature, first use acetone, and then use alcohol to wipe the polyurethane foam workpiece.

[0030] 3) Drying and stress relief treatment: put the polyurethane foam in a drying oven, set the temperature of the oven at 40°C, and dry at a constant t...

example 2

[0039] Example 2. A factory requires Al film to be deposited on a PTFE plastic workpiece with a deposition rate of 50nm / min and a target film thickness of 10μm.

[0040] a) Surface pretreatment of foamed plastic workpieces

[0041] 1) Surface cleaning: Use an organic cleaning agent to wipe and clean the PTFE plastic that has cooled to room temperature, first use acetone, and then use alcohol to wipe the PTFE plastic workpiece.

[0042] 2) Drying and stress-relief treatment: place the polytetrafluoroplastic in a drying oven, set the temperature of the oven at 80°C, and dry at a constant temperature for 4 hours.

[0043] b) Assembly, vacuuming, degassing

[0044] Vacuum to the background vacuum of 2×10 -4 Pa, argon gas is introduced into the vacuum chamber, the gas flow rate is 80 sccm, and the air pressure in the vacuum chamber is maintained at 1.7×10 -1 Pa, the degassing time is 30min.

[0045] c) Pre-sputter cleaning of foamed plastic workpieces and sputtering targets

...

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Abstract

The invention relates to a surface metallization method for foamed plastic by adopting high-power pulse magnetron sputtering and belongs to the technical field of material surface engineering. The surface metallization method for the foamed plastic by adopting high-power pulse magnetron sputtering comprises the following steps of: firstly carrying out pre-treatment of surface sealing, cleaning, drying and distressing on the surface of foamed plastic, then loading samples, vacuumizing, and degassing; carrying out pre-sputtering to clean a foamed plastic workpiece and sputtering a target material; depositing a metal coating by adopting high-power pulse magnetron sputtering, wherein a metal coating with high ionization rate is deposited on the surface of the foamed plastic workpiece at a low temperature by controlling pulse configuration, frequency, charging voltage and sputtering / cooling time, and a metal coating with smooth surface, compact structure and high cohesion between film and substrate material is prepared; and finally cooling, taking away the foamed plastic workpiece, and inspecting properties of the metallized foamed plastic such as surface appearance, hardness and cohesion between film and substrate material. The surface metallization method for the foamed plastic by adopting high-power pulse magnetron sputtering has the advantages that the surface metallization method is applicable to various metallized coatings; the coating is smooth and compact in surface and high in cohesion between film and substrate material; the sputtering temperature and the deposition temperature are low, and a foamed plastic substrate can not deform; and the surface metallization method is safe and environment-friendly, and no chromic acid reagent which contains Cr<6+> and is related in a chemical plating process is used.

Description

technical field [0001] The invention relates to a method for metallizing the surface of foamed plastics by high-power pulse magnetron sputtering, and belongs to the field of material surface engineering. Background technique [0002] In 1946, the United States began to produce plastic surface metallization. Plastic surface metallization can greatly improve the performance of plastic products and expand the scope of use of plastic products. Therefore, plastic metallization production has developed rapidly. Nowadays, plastic metallization parts have been widely used. It is used in the automobile industry, instrumentation manufacturing industry, shipbuilding industry, electronics industry and aviation and aerospace industries. The application purpose of the plastic metallization process has developed from the initial simple decoration and aesthetics to the use of its performance advantages to replace difficult-to-machine metal parts, simplify the processing technology, save pre...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/35C23C14/20C23C14/54C23C14/02
Inventor 雷明凯朱小鹏李昱鹏吴志立吴彼
Owner DALIAN UNIV OF TECH
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