Method and equipment for utilizing ultrafast lasers for frequency modulation of quartz crystals

Abstract

The invention provides equipment for utilizing ultrafast lasers for frequency modulation of quartz crystals. The equipment comprises a feeding frame used for placement of quartz crystals to be processed, a computer control system, a frequency measuring collection module used for measuring resonance frequency of the quartz crystals and arranged on the feeding frame, an online position detection module arranged on the feeding frame, an ultrafast laser which realizes etching by casting lasers generated by an X/Y-axis scanning galvanometer to the quartz crystals, and an automatic loading mechanism which is electrically connected with the computer control system. The invention further provides a method for utilizing the ultrafast lasers for frequency modulation of the quartz crystals, and surface quality of the quartz crystals is changed by etching sliver-coated layers on surfaces of the quartz crystals and quartz crystal materials under the silver-coated layers by the ultrafast laser, so that large-range accurate frequency modulation of frequency of the quartz crystals is realized, and frequency stability of finished crystal products is improved.

Description

technical field [0001] The invention relates to the field of quartz crystal production equipment, in particular to a method and equipment for frequency modulation of quartz crystal by using an ultrafast laser. Background technique [0002] Quartz crystal resonator components have the characteristics of small size, high precision, and good frequency stability. They have been widely used in various circuits. During the production process, it needs to adjust the frequency to achieve the specified frequency rating and error range. The principle on which the frequency adjustment of the quartz crystal resonator is based is the Sauerbrey equation, which points out that the change of the resonant frequency of the quartz crystal is inversely proportional to the change of the quality of the substance attached to the crystal surface, so the frequency adjustment method of the quartz crystal is mainly by changing its The quality of the surface material is achieved. The existing commonly...

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Problems solved by technology

[0003] The above methods of frequency adjustment of quartz crystal resonators have disadvantages: 1. Manual grinding wheel grinding frequency modulation is labor-intensive, low production efficiency, production speed and frequency adjustment error range are greatly affected by the quality of processing personnel; 2. Automatic grinding wheel grinding once It is difficult to precisely control the amount of silver plating on the quartz crystal and surface, and the production efficiency is low if the material is removed with a finer-grained grinding wheel. At the same time, the dust and microcracks generated by the grinding wheel will affect the quality of the quartz crystal component; 3. Long-pulse laser irradiation The method of plating silver layer on the surface of quartz crystal and vaporizing it can realize fine-tuning, but because the long-pulse laser can only remove the silver layer on the surface without affecting the underlying quartz material, and the quality of the silver layer is relatively low, so the frequency adjustment range is small. The frequency of domestic crystal generation is highly discrete, so it is difficult to achieve the purpose of frequency modulation through long-pulse laser to achieve the rated frequency; 4. Using grinding wheel processing and long-pulse laser processing is a processing method that uses mechanical grinding and laser thermal effects. The method will produce material recasting layer or micro-crack effect on the quartz crystal and the silver-plated layer on the surface, thus affecting the frequency stability of the finished crystal; 5. The resonant frequency of the quartz crystal is greatly affected by the temperature, so the heat generated by the thermal effect of processing will seriously affect the measurement As a result, it affects the frequency dispersion of the finished product after processing

However, this invention can only deal with the silver-plated layer on the surface of the quartz crystal, and cannot process the material of the quartz crystal under the silver-plated layer, and the quality of the silver layer is relatively low, so the range of frequency adjustment that can be performed is small. The deviation between the generated initial frequency and the rated frequency is quite different, so it is difficult to achieve the purpose of one-time frequency modulation through long-pulse laser to achieve the rated frequency

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