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Simplified baffle layer suitable for IBAD-MgO (ion beam assisted deposition-magnesium oxide) growth on metal substrate and preparation method thereof

A metal baseband and barrier layer technology, which is applied in the direction of metal material coating process, coating, superimposed layer plating, etc., can solve the problems of increasing the cost of the target material, the cost of the precursor solution, increasing the preparation time, increasing the cost of equipment, etc., to achieve The process parameters are easy to control, the preparation method is simple, and the effect of reducing the number of layers

Active Publication Date: 2013-08-21
SHANGHAI SUPERCONDUCTOR TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

To prepare Al 2 o 3 and Y 2 o 3 Two layers can be used in two ways, one way is to use the same equipment to open the cavity to change the target or replace the precursor solution, which will increase the cost of the target material or the cost of the precursor solution, and increase the preparation time; the other way is to use different equipment, Al was prepared in the first equipment 2 o 3 Layer, in the preparation of Y in the second equipment 2 o 3 layer, which will increase the cost of equipment and also increase the cost of preparation

Method used

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  • Simplified baffle layer suitable for IBAD-MgO (ion beam assisted deposition-magnesium oxide) growth on metal substrate and preparation method thereof
  • Simplified baffle layer suitable for IBAD-MgO (ion beam assisted deposition-magnesium oxide) growth on metal substrate and preparation method thereof
  • Simplified baffle layer suitable for IBAD-MgO (ion beam assisted deposition-magnesium oxide) growth on metal substrate and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0071] Using multi-channel laser coating technology to quickly prepare a single YAlO barrier layer on a metal substrate, the method includes the following steps:

[0072] Step 1. Install the YAlO oxide target prepared by high-temperature sintering on the target holder in the cavity;

[0073] Step 2. Wrap the metal base tape in a multi-channel pulsed laser coating system;

[0074] Step 3. Close the door of the coating system and evacuate to the required vacuum degree of 1×10 -6 Torr;

[0075] Step 4. Introduce oxygen, the mass flow meter controls the oxygen flow rate to 10 sccm, and the gas pressure is adjusted to 1×10 by the molecular pump gate valve. -3 Torr;

[0076] Step 5. Start the laser target rotation and scanning system, start the excimer laser, adjust the laser energy to 200mJ, and the laser frequency to 180Hz;

[0077] Step 6. After the air pressure, laser energy, and laser frequency are stable, turn on the laser optical path switch to start the pre-sputtering pr...

Embodiment 2

[0081] Using multi-channel laser coating technology to quickly prepare a single YAlO barrier layer on a metal substrate, the method includes the following steps:

[0082] Step 1. Install the YAlO oxide target prepared by high-temperature sintering on the target holder in the cavity;

[0083] Step 2. Wrap the metal base tape in a multi-channel pulsed laser coating system;

[0084] Step 3. Close the door of the coating system and evacuate to the required vacuum degree of 3×10 -6 Torr;

[0085] Step 4, feed oxygen, the flow of oxygen is controlled to 15 sccm by the mass flow meter, and the air pressure of the gas is adjusted to 1×10 by the gate valve of the molecular pump -2 Torr;

[0086] Step 5. Start the laser target rotation and scanning system, start the excimer laser, adjust the energy to 350mJ, and the frequency to 100Hz;

[0087] Step 6. After the air pressure, laser energy, and laser frequency are stable, turn on the laser optical path switch to start the pre-sputter...

Embodiment 3

[0091] Using multi-channel laser coating technology to quickly prepare a single YAlO barrier layer on a metal substrate, the method includes the following steps:

[0092] Step 1. Install the YAlO oxide target prepared by high-temperature sintering on the target holder in the cavity;

[0093] Step 2. Wrap the metal base tape in a multi-channel pulsed laser coating system;

[0094] Step 3. Close the door of the coating system and evacuate to the required vacuum degree of 6×10 -6 Torr;

[0095] Step 4, feed oxygen, the flow of oxygen is controlled to 20 sccm by the mass flow meter, and the air pressure of the gas is adjusted to 2×10 by the gate valve of the molecular pump -1 Torr;

[0096] Step 5. Start the laser target rotation and scanning system, start the excimer laser, adjust the laser energy to 450mJ, and the frequency to 40Hz;

[0097] Step 6. After the air pressure, laser energy, and laser frequency are stable, turn on the laser optical path switch to start the pre-sp...

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Abstract

The invention discloses a simplified baffle layer suitable for IBAD-MgO (ion beam assisted deposition-magnesium oxide) growth on a metal substrate and a preparation method thereof. The simplified baffle layer is arranged on the metal substrate and is a single YAlO baffle layer; and the single YAlO baffle layer is prepared by adopting a multi-channel pulse laser coating technology or a multi-channel magnetron sputtering technology. The YAlO baffle layer with a smooth surface, even surface particle size, low roughness and strong bonding strength is prepared; the YAlO baffle layer can prevent atoms of the metal substrate from diffusing to the other layers, can reduce the roughness of the metal substrate and also can be used as a nucleation layer of an IBAD-MgO layer; the surface roughness of the YAlO baffle layer is smaller than 2 nanometers; the texture degree in the surface of the prepared IBAD-MgO layer is less than 7 degrees; and a rare earth oxide superconducting layer with high performance can epitaxially grow on the baffle layer. By adopting the simplified baffle layer, the quantity of the baffle layers for IBAD-MgO is reduced; simplification, fast speed and low cost of the manufacturing technology are achieved; the simplified baffle layer has high stability, repeatability and reliability, and good application prospect in industry, and is suitable for industrial production.

Description

technical field [0001] The invention relates to the field of second-generation high-temperature superconducting strips of yttrium barium copper oxide (YBCO), in particular to a simplified barrier layer suitable for IBAD-MgO growth on a metal base strip and a preparation method thereof. Background technique [0002] As the second-generation high-temperature superconducting tape, yttrium-based (YBa 2 Cu 3 o 7-δ , referred to as YBCO) coated conductor has a high critical current density (J c ), magnetic field (J c -B) Features and low price, so it has great application prospects in the fields of electric power, energy, transportation, and information, such as motors, motors, transformers, current limiters, magnets, superconducting energy storage, nuclear magnetic resonance imaging, etc., Therefore, high-temperature superconducting technology is widely regarded as a strategic technology in the 21st century. It is an energy, material and military technology that is mainly supp...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/08C23C14/34
CPCC23C14/28C23C14/08C23C14/3414C23C28/042
Inventor 李贻杰刘林飞肖桂娜
Owner SHANGHAI SUPERCONDUCTOR TECH CO LTD
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