Preparation method of water-soluble polystyrene-silicon dioxide core-shell type composite particle

Abstract

The invention relates to a preparation method of a water-soluble polystyrene-silicon dioxide core-shell type composite particle. The preparation method comprises the following steps: (1), preparing a polystyrene particle water solution of which the surface is modified by a surfactant; (2), preparing the water solution of a coupling agent and silicic acid, regulating the pH (potential of hydrogen) by a pH regulating agent, so as to obtain an alkaline silicic acid water solution treated by the coupling agent; (3), regulating the polystyrene particle water solution of which the surface is modified by the surfactant, prepared in the step (1), to be alkaline, under a mechanical stirring heating condition, dropwise adding the alkaline silicic acid water solution treated by the coupling agent, prepared in the step (2), and carrying out a polymerization reaction; and (4), stopping heating after the reaction, keeping on stirring, cooling to a normal temperature, thus obtaining the polystyrene-silicon dioxide core-shell type composite particle; and the preparation method has the characteristics of being low in cost and easy for production.

Description

technical field [0001] The invention relates to a preparation method of water-soluble polystyrene-silicon dioxide core-shell composite particles, which belongs to the field of chemical mechanical polishing liquid. Background technique [0002] VLSI has become an important symbol to measure a country's level of science and technology and industrial development, and it is also a field where the world's major industrial countries are most competitive. Chemical mechanical polishing (CMP) is one of the key technologies in the VLSI manufacturing process. In CMP polishing fluid, abrasive is an important factor affecting the quality of the polished surface. For the polishing of copper and some low-k materials, due to their low mechanical strength and Mohs hardness, traditional abrasives (such as silicon oxide, aluminum oxide, cerium oxide, etc.) can easily cause serious mechanical damage, which greatly improves the material Surface roughness. In order to reduce the scratches and ...

AI Technical Summary

Problems solved by technology

[0004] Most current PS-SiO 2 The preparation of core-shell composite particles requires an alcohol system or a water-alcohol mixed system to better disperse the organic phase. However, most of the polishing fluids used in the market use water as a solvent, and the existing preparation methods are not in line with this; In addition, SiO in existing preparation methods 2 Most of the shells are obtained by TEOS hydrolysis method, the reaction time is long, the reagent cost is high; and it is dangerous, not suitable for industrial large-scale production

Images