Rare earth polishing powder and preparation method thereof

Abstract

The invention relates to rare earth polishing powder, which is uniform solid solution with the crystal forms of fluorine oxide rare earth and cubic phase rare earth oxide. The invention further discloses a preparation method for the rare earth polishing powder. The preparation method comprises the steps of preparation of rare earth aqueous solution, precipitation, dehydration, roasting, smashing and the like. The prepared rare earth polishing powder is uniform solid solution with the crystal forms of fluorine oxide rare earth and cubic phase rare earth oxide. According to the rare earth polishing powder and preparation method thereof, F is introduced in precipitation process, the later fluorization step can be omitted, and the preparation method has the advantages of being simple in process, low in cost, and less in waste water. Through adding ammonia sulfate in the precipitation process, when high-temperature roasting is performed, on one hand, the condition that crystal lattices of the main active ingredient cerium oxide in the polishing powder are disordered to form activated cerium oxide can be ensured, so that the activated cerium oxide and glass surface have affinity, the chemical activity of the polishing powder can be enhanced, and further the polishing mass of the polishing powder can be promoted; on the other hand, the cubic crystal form of the rare earth oxide can be ensured, and the polishing mass increase can be promoted.

Description

technical field [0001] The invention relates to a rare earth polishing powder and a preparation method thereof, in particular to a cerium-based mixed rare earth polishing powder suitable for surface polishing of precision devices in the electronic information industry such as integrated circuits, flat displays and optical glasses, and a preparation method thereof. Background technique [0002] At present, various glass materials are widely used, and these materials need to undergo necessary surface polishing before being applied. In the early days, materials such as zirconia, iron oxide or silicon dioxide were mainly used to polish various glass surfaces. In recent years, considering the polishing efficiency and precision, polishing materials with rare earth oxides (especially cerium oxide) as the main component have been used. It is considered more suitable for surface polishing of glass materials. [0003] With the rapid development of electronic information technology, t...

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Problems solved by technology

Rare earth fluoride particles are relatively fine, and the post-treatment process is complicated; at the same time, the mixing process of fluoride and oxide is also relatively complicated; this method will cause the phenomenon of secondary sintering of particles, and some particles will grow abnormally after secondary roasting, forming Localized coarse particles that cause scratches during polishing

[0012] At the same time, the true density of the rare earth polishing powder is relatively high, which makes the polishing powder easy to precipitate during use, resulting in a low utilization rate of the polishing powder

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