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Degassing agent with protective layer as well as preparation method thereof

A getter and protective layer technology, applied in the field of getter and its preparation, can solve the problems of easy oxidation of the getter, short life of the getter, high activation temperature of the getter, and achieve good absorption capacity and activation The effect of low temperature and lower activation temperature

Inactive Publication Date: 2014-05-21
GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

These getters mainly have the following disadvantages: (1) The activation temperature of the getters is relatively high, and the temperature range is 500-900 ° C, which has certain limitations for the use of high-precision microelectronic devices; (2) The getters are exposed to It is easily oxidized in the atmospheric state, and the life of the getter is short

Method used

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  • Degassing agent with protective layer as well as preparation method thereof
  • Degassing agent with protective layer as well as preparation method thereof
  • Degassing agent with protective layer as well as preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0037] Use vacuum electric arc furnace to melt Zr-V-Fe alloy, in which the mass fraction of each component is (Zr: 80%, V: 10%, Fe: 10%), and crush it under the protection of argon until the particle diameter is 50~100μm , to get the getter particle core.

[0038] A Ni protective layer is deposited on the core of the getter particles by electroless plating. The process steps of depositing the Ni protective layer: wash the getter particles with deionized water, corrode the getter particles with HF (0.1wt.%) for 300s, and then wash with deionized water. Prepare the electroless nickel plating solution, use stainless steel as the plating tank, and use one-third of the volume of the plating tank to heat and dissolve NiCl 2 ·6H 2 O (15g / L), use another third of the water to dissolve Na 3 C 6 h 5 o 7 2H 2 O(30g / L) and H 3 BO 3 (30g / L), then NiCl 2 ·6H 2 The O solution was poured into it under stirring, clarified and filtered, and dissolved NaH with the remaining one-third ...

Embodiment 2

[0041] Use vacuum electric arc furnace to melt Zr-V-Fe alloy, in which the mass fraction of each component is (Zr: 60%, V: 35%, Fe: 5%), and crush it under the protection of argon until the particle diameter is 50~100μm , to get the getter particle core.

[0042] A Ni protective layer is deposited on the core of the getter particles by electroless plating. The process steps of depositing the Ni protective layer: wash the getter particles with deionized water, corrode the getter particles with HF (1.3wt.%) for 60s, and then wash with deionized water. Prepare the electroless nickel plating solution, use stainless steel as the plating tank, and use one-third of the volume of the plating tank to heat and dissolve NiCl 2 ·6H 2 O (25g / L), use another third of the water to dissolve Na 3 C 6 h 5 o 7 2H 2 O(50g / L) and H 3 BO 3 (36g / L), then NiCl 2 ·6H 2 The O solution was poured into it under stirring, clarified and filtered, and dissolved NaH with the remaining one-third of...

Embodiment 3

[0045] Use vacuum electric arc furnace to melt Zr-V-Fe alloy, in which the mass fraction of each component is (Zr: 79%, V: 20%, Fe: 1%), and crush it under the protection of argon until the particle diameter is 50~100μm , to get the getter particle core.

[0046] A Ni protective layer is deposited on the core of the getter particles by electroless plating. The process steps of depositing the Ni protective layer: wash the getter particles with deionized water, corrode the getter particles with HF (1.0wt.%) for 200s, and then wash with deionized water. Prepare the electroless nickel plating solution, use stainless steel as the plating tank, and use one-third of the volume of the plating tank to heat and dissolve NiCl 2 ·6H 2 O (35g / L), use another third of the water to dissolve Na 3 C 6 h 5 o 7 2H 2 O(45g / L) and H 3 BO 3 (50g / L), then NiCl 2 ·6H 2 The O solution was poured into it under stirring, clarified and filtered, and dissolved NaH with the remaining one-third o...

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Abstract

The invention relates to a degassing agent with a protective layer as well as a preparation method thereof. The degassing agent provided by the invention is composed of degassing agent particles of dual-layer structures; the core comprises the main components of Zr, V and Fe; the protective layer comprises the main component of Ni. According to the invention, the degassing agent particles with the protective layer are prepared by chemical coating, and the degassing agent with the protective layer is prepared by compressing and sintering; the surfaces of the degassing agent particles are coated with a Ni protective layer; Ni has a dissociation function to a hydrogen molecule and can improve the absorbing capacity of hydrogen, and moreover, the protective layer can prevent oxygen adsorption and reduce the activation temperature. The degassing agent provided by the invention can be activated in the process of baking at 180-350 DEG C, has a favorable degassing function after baking at room temperature, and can be used for absorbing and removing internal residual gases in high-vacuum devices.

Description

technical field [0001] The invention relates to a getter with a protective layer and a preparation method thereof. The getter of the invention is a high-performance low-temperature activated non-evaporable getter. Background technique [0002] The getter is one of the effective means to increase the vacuum degree. The getter can react or adsorb with active gas molecules through physical or chemical action, so as to effectively increase the vacuum degree in the device. [0003] Commonly used getter materials include barium, strontium, magnesium, calcium, titanium, zirconium, hafnium, vanadium, barium aluminum alloy or alloys or compounds of transition metals and aluminum or rare earth elements, among which binary alloys such as Ba-Al, Ti-V, Zr-Al, etc., ternary alloys such as Ba-Al-Ni, Zr-V-Fe, Ti-Zr-V, etc. Such materials generally have high activity, low saturated vapor pressure, and large specific surface area, and are resistant to residual active gases such as H in elec...

Claims

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Application Information

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IPC IPC(8): B01J20/02B01J20/30B01J20/28
Inventor 杜军崔航张心强朱君田士法
Owner GENERAL RESEARCH INSTITUTE FOR NONFERROUS METALS BEIJNG
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