Stable zirconia ceramic target material for electron beam physic vapor deposition, and its preparation method

A technology for physical vapor deposition and stabilization of zirconia, which is applied in the field of ceramic material preparation, can solve the problems of inability to meet high-performance EB-PVD coatings, the deviation of coating composition and phase structure from the design value, and the difficulty in controlling density and impurities. Achieve the effect of shortening the sintering time, avoiding secondary recrystallization, and improving the utilization rate of powder

Active Publication Date: 2014-07-23
INNER MONGOLIA UNIV OF SCI & TECH
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  • Summary
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  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, my country's special research on the preparation of ceramic targets for EB-PVD has not been extensively and deeply carried out, especially the accumulation of relevant research experience in the direct preparation of high-performance ceramic targets from oxide raw materials is still insufficient, and it is still unable to meet the requirements for the preparation of high-performance EB-PVD. Coating needs, especially the needs of engineering applications, so there is an urgent need to develop mature preparation methods and processes for high-performance ceramic targets to meet the ne

Method used

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  • Stable zirconia ceramic target material for electron beam physic vapor deposition, and its preparation method
  • Stable zirconia ceramic target material for electron beam physic vapor deposition, and its preparation method
  • Stable zirconia ceramic target material for electron beam physic vapor deposition, and its preparation method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0026] ZrO 2 (purity 99.9%) and Y 2 o 3 (Purity 99.99%) Proportion according to mass ratio 92:8, and weigh. The raw materials used to prepare 10kg ceramic powder are: ZrO 2 9.2kg, Y 2 o 3 0.8kg. Put the weighed raw materials into a stirring ball mill, add an appropriate amount of deionized water with a material-to-ball ratio of 1:2, and a material-to-water ratio of 5:3, and use zirconia balls as grinding bodies for ball milling for 10 hours. The slurry was dehydrated by a filter press, put into an oven, and dried at a temperature of 80° C. for 20 hours to obtain a raw meal powder. The raw meal powder was added to the starch powder with a mass fraction of 4%, and calcined at 1550°C for 15 hours, and the sintering atmosphere was an oxidizing atmosphere to obtain clinker blocks. The clinker block is crushed to less than 1 mm, put into a polyurethane ball mill tank, and wet-milled with deionized water for 18 hours, the ratio of material to ball is 1:2, and the ratio of mate...

Embodiment 2

[0028] ZrO 2 (purity 99.9%), Ta 2 o 5 (purity 99.99%) and Y 2 o 3 (purity 99.99%) according to 16.6mol YO 1.5 : 17.6mol TaO 2.5 : 65.8molZrO 2 Proportion and weigh. The raw materials used to prepare 10kg ceramic powder are: ZrO 2 5.85kg, Y 2 o 3 1.35kg, Ta 2 o 5 2.80 kg. Put the weighed oxide raw materials into a stirring ball mill, add an appropriate amount of deionized water, the material-to-ball ratio is 1:2, and the material-to-water ratio is 5:3, and use zirconia balls as grinding bodies for ball milling for 12 hours. The slurry was dehydrated by a filter press, put into an oven, and dried at a temperature of 95° C. for 18 hours to obtain a raw meal powder. The raw meal powder was added to the starch powder with a mass fraction of 6%, and calcined at 1600°C for 12.5 hours, and the sintering atmosphere was an oxidizing atmosphere to obtain clinker blocks. The clinker block is crushed to less than 1 mm, put into a polyurethane ball mill tank, and deionized wat...

Embodiment 3

[0030] ZrO 2 (purity 99.9%), Ta 2 o 5 (purity 99.9%) Y 2 o 3 (purity 99.99%) and Sm 2 o 3 (purity 99.99%), according to 2molSmO 1.5 : 14.6mol YO 1.5 : 17.6mol TaO 2.5 : 65.8molZrO 2 Proportion and weigh. The raw materials used to prepare 10kg ceramic powder are: ZrO 2 5.79kg, Y 2 o 3 1.18kg, Ta 2 o 5 2.78 kg, Sm 2 o 3 0.25kg. Put the weighed raw materials into a stirring ball mill, add an appropriate amount of deionized water, and use zirconia balls as grinding bodies for ball milling for 11 hours. The material-to-ball ratio is 1:2, and the material-to-water ratio is 5:3. The slurry is dehydrated by a filter press, put into an oven, and dried at a temperature of 100° C. for 20 hours to obtain a raw meal powder. Add raw meal powder to starch powder with a mass fraction of 5%, calcined at 1580°C for 15 hours, and the sintering atmosphere is an oxidizing atmosphere to obtain clinker blocks. The clinker block is crushed to less than 1 mm, put into a polyurethane...

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Abstract

The invention relates to a stable zirconia ceramic target material for electron beam physic vapor deposition (EB-PVD), and its preparation method, and belongs to the ceramic material preparation field. The ceramic target material with a good deposition performance is obtained by adopting a two-step solid phase sintering process with highly pure zirconia and an oxide stabilizer as raw materials. The preparation method comprises the following steps: carrying out high temperature solid phase synthesis and ball milling to prepare ceramic powder raw materials with stable crystal phase and uniform granularity, carrying out high pressure molding through combining molding pre-pressing with isostatic pressing, carrying out dimensional fine finishing, and carrying out low temperature sintering to prepare the EB-PVD ceramic target material. The ceramic target material prepared in the invention has the advantages of accurate chemical components, stable crystal phase, and small high-temperature volume deformation, has a microscopic crystal grain size uniformity of below 5mum, and satisfies technologic requirements of no splashing of the EB-PVD technology, and stable composition and performances of the obtained coating. The two-step solid phase sintering process realizes a short high temperature sintering time, low temperature heat treatment of the target material reduces the energy consumption, and the preparation method has the advantages of simple technology and equipment, good batch performance stability, and realization of the popularization to the industrialized production.

Description

technical field [0001] The invention relates to a stable zirconia ceramic target material for electron beam physical vapor deposition and a preparation method thereof. High-purity oxide is used as a raw material, and a ceramic target material with good deposition performance is prepared by a two-step solid-phase firing method, which belongs to the preparation of ceramic materials field. technical background [0002] The thermal barrier coating prepared by electron beam physical vapor deposition (EB-PVD) technology has a columnar crystal structure, the coating has higher strain tolerance, high bonding strength, high thermal cycle life, and the coating structure is denser and more resistant to oxidation. And thermal corrosion performance is better, the surface finish of the coating is high, and it is beneficial to maintain the aerodynamic performance of the blade. It has been widely used in aero turbine engine rotor blades and guide blades. However, there is a big gap between...

Claims

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Application Information

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IPC IPC(8): C04B35/48C04B35/622
Inventor 宋希文谢敏包金小周芬安胜利
Owner INNER MONGOLIA UNIV OF SCI & TECH
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