The invention relates to a stable
zirconia ceramic target material for
electron beam physic vapor deposition (EB-PVD), and its preparation method, and belongs to the
ceramic material preparation field. The
ceramic target material with a good deposition performance is obtained by adopting a two-step
solid phase
sintering process with highly pure zirconia and an
oxide stabilizer as raw materials. The preparation method comprises the following steps: carrying out high temperature
solid phase synthesis and ball milling to prepare
ceramic powder raw materials with stable
crystal phase and uniform
granularity, carrying out
high pressure molding through combining molding pre-pressing with isostatic pressing, carrying out dimensional fine finishing, and carrying out low temperature
sintering to prepare the EB-PVD ceramic target material. The ceramic target material prepared in the invention has the advantages of accurate chemical components, stable
crystal phase, and small high-temperature
volume deformation, has a microscopic
crystal grain size uniformity of below 5mum, and satisfies technologic requirements of no splashing of the EB-PVD technology, and stable composition and performances of the obtained
coating. The two-step
solid phase
sintering process realizes a short high temperature sintering time, low temperature heat treatment of the target material reduces the
energy consumption, and the preparation method has the advantages of simple technology and equipment, good batch performance stability, and realization of the popularization to the industrialized production.