The invention discloses an identification method of a piezoelectric
ceramic deformed mirror
surface shape response
nonlinear model, and belongs to the technical field of
adaptive optics. The method comprises the following steps: firstly, transmitting calibration light to a Shack-Hartmann
wavefront sensor through a piezoelectric
ceramic deformable mirror and a
relay optical
system; then grouping the piezoelectric
ceramic drivers, sequentially applying continuous step, variable period
square wave and reduced amplitude
triangular wave voltage signals, and synchronously collecting slope data output by a
wavefront sensor; extracting the slope of the nearest sub-aperture surrounding area of the driver, calculating the slope in the x / y direction, and synthesizing the slope into a total slope; and finally, the
creep characteristic of the
surface shape response is fitted through the
transfer function model, the
resonance characteristic of the
surface shape response is fitted through the multi-order
resonance model, and the
hysteresis characteristic of the surface shape response is fitted through the KP
hysteresis model, so that nonlinear characteristic high-precision identification is realized. According to the invention, the open-
loop control precision and stability of the piezoelectric ceramic
deformable mirror can be improved, and the method can be used for open-
loop control of a multi-target adaptive optical
deformable mirror.