Method for preparing copper-zinc-tin-sulfur thin film on flexible substrate by magnetron sputtering

Abstract

The invention discloses a method for preparing a copper zinc tin sulfide thin film on a flexible substrate through a magnetron sputtering method. According to the method, magnetron sputtering is conducted on a metal Cu-Zn-Sn precursor on a flexible substrate material first, and then a sulfidizing method is used for preparing the copper zinc tin sulfide thin film. The method specifically includes the following steps that metal Cu, Zn and Sn targets are chosen as sputtering target materials; the flexible substrate material is cleaned; the magnetron sputtering method is used, and the metal Cu-Zn-Sn precursor is deposited on the flexible substrate; sulfidizing is conducted on the Cu-Zn-Sn precursor in a sulfur-containing atmosphere, so that the flexible substrate copper zinc tin sulfide thin film is obtained; the prepared flexible substrate copper zinc tin sulfide thin film has an excellent optical absorption property in a visible region. The method for preparing the copper zinc tin sulfide thin film on the flexible substrate through the magnetron sputtering method can be applied to different types of flexible substrate materials, and has the advantages of being capable of effectively adjusting the components of the thin film, improving the crystal quality of the thin film, being good in technological process repeatability and the like.

Description

technical field

[0001] The invention relates to the technical field of preparation of solar cell absorbing layer materials, in particular to a method for preparing a copper-zinc-tin-sulfur thin film on a flexible substrate by using a magnetron sputtering method. Background technique

[0002] In contemporary society, energy shortage and environmental pollution are the key factors restricting the sustainable development of human society. Solar energy has the advantages of safety, reliability, inexhaustibility, and no pollution during use. It is an ideal renewable energy source. Effective use of solar energy is one of the effective ways to solve energy crisis and environmental pollution. Solar cells are devices that convert solar energy into electrical energy. Compared with traditional monocrystalline silicon and polycrystalline silicon solar cells, thin-film solar cells have the advantages of using less raw materials and low manufacturing costs. Among them, copper indium galli...

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