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Laminated body, method for producing the same, printed wiring board, and composition for forming an underlayer

A manufacturing method and a technology for a laminate, which are applied in the manufacture of printed circuit precursors, printed circuits, printed circuits, etc., can solve the problems of poor high-frequency characteristics and complicated steps, and achieve the effects of excellent purification and adhesion.

Active Publication Date: 2015-12-09
FUJIFILM CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, there is a problem that high-frequency characteristics when used as metal wiring deteriorate due to unevenness of the substrate interface portion of the obtained metal pattern.
In addition, in order to roughen the surface of the substrate, it is necessary to treat the surface of the substrate with a strong acid such as chromic acid, so there is also a problem that complicated steps are required in order to obtain a metal pattern with excellent adhesion between the metal layer and the substrate.

Method used

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  • Laminated body, method for producing the same, printed wiring board, and composition for forming an underlayer
  • Laminated body, method for producing the same, printed wiring board, and composition for forming an underlayer
  • Laminated body, method for producing the same, printed wiring board, and composition for forming an underlayer

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 18

[0275] After heat-treating the laminate with the electroless-plated metal layer obtained in Example 4 at 150° C. / 15 minutes, on the surface of the metal layer of the laminate, a vacuum bonding machine (Meiji Seisakusho Co., Ltd.) Manufacture: MVLP-600), a dry resist film (manufactured by Hitachi Chemical Co., Ltd.; RY3315, film thickness 15 μm) was laminated at 70° C. and 0.2 MPa. Next, on the laminated body on which the dry resist film was laminated, a glass mask capable of forming the comb-shaped wiring specified in JPCA (Japan Printed Circuit Association)-ET01 (according to JPCA-BU01-2007) was adhered. The resist film was irradiated with light energy of 70mJ by using an exposure machine with a central wavelength of 405nm. Spray 1% Na on the exposed laminate with a spray pressure of 0.2MPa 2 CO 3 Aqueous solution for development. Then, the laminate is washed with water and dried to form a resist pattern for the semi-addition method on the metal layer.

[0276] Form a 10 ...

Embodiment 19~ Embodiment 27 and comparative example 3~ comparative example 4

[0292] According to Table 5 below, the composition for forming an underlayer was applied on a substrate by a spin coating method, and dried at 180° C. for 60 minutes. Thereby, an underlayer (thickness: 2.8 μm) was formed on the substrate.

[0293] Next, the substrate on which the underlayer was formed was placed in Alcup (Alcup) ACL (2-aminoethanol: 4.9% by mass, diethylenetriamine: 2.4% by mass, surfactant: 4.9% by mass, Uemura Industrial Co., Ltd.) 95 g and sodium hydroxide 5 g mixed liquid (pH value: 14) was immersed for 5 minutes, and then washed with water. Next, it was immersed in Alcup MAT-2 (manufactured by Uemura Industrial Co., Ltd.) as a Pd catalyst supply solution at 26°C for 5 minutes, and then at 37°C in Alcup as a reducing agent. (Alcup) MAB (manufactured by Uemura Industries Co., Ltd.) was immersed for 3 minutes, and then washed with water. Next, dip in Alcup (Alcup) MEL (manufactured by Uemura Industrial Co., Ltd.) as an activation treatment solution for 1 m...

Embodiment 28~ Embodiment 34

[0316] Using a rocking mill (rockingmill) RM-05 (SeiwaGiken (SeiwaGiken) Co., Ltd.), after inputting a sample amount of 60 g (using a 200 mL PP bottle), Under the conditions of 100 g of zirconia beads, 50 Hz, and 30 min, the samples charged according to the ratios in Table 6 below were dispersed to obtain silicon oxide dispersion liquid W1 to silicon oxide dispersion liquid W7.

[0317] In addition, "Aerosil (Aerosil) 200" in Table 6 was manufactured using the Aerosil company.

[0318] [Table 6]

[0319] Table 6

[0320] the solution

Metal oxide

Dispersant (surfactant)

solvent

W1

Aerosil 200 (50g)

none

Cyclopentanone (450g)

W2

Aerosil 200 (50g)

SOLSPERSE 18000 (20g)

Cyclopentanone (450g)

W3

Aerosil 200 (50g)

SOLSPERSE 21000 (20g)

Cyclopentanone (450g)

W4

Aerosil 200 (50g)

Sosperse (SOLSPERSE) 24000GR (20g)

Cyclopentanone (450g)

W5

Aerosil 200 (50g)

Sosperse (SOLS...

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Abstract

The purpose of the present invention is to provide a method for producing a laminate wherein a metal layer exhibits excellent adhesion and has excellent cleanliness on the surface. A method for producing a laminate of the present invention comprises: a base layer formation step wherein a base layer, which contains a polymer having an optionally hydrogenated conjugated diene compound unit and metal oxide particles having an average particle diameter of 400 nm or less, is formed; a catalyst providing step wherein the base layer is provided with a plating catalyst or a precursor thereof by bringing the base layer into contact with an alkaline plating catalyst liquid that contains the plating catalyst or the precursor thereof; and a plating step wherein a metal layer is formed on the base layer by plating the base layer that has been provided with the plating catalyst or the precursor thereof.

Description

technical field [0001] The present invention relates to a laminate having a metal layer, a method for producing the same, and a composition for forming an underlayer used in the method. Background technique [0002] At present, metal wiring boards in which wiring of a metal pattern is formed on the surface of an insulating substrate are widely used in electronic parts and semiconductor elements. [0003] The manufacturing method of this metal wiring board mainly uses "subtractive process (subtractive process)". This subtractive method is a method in which a photosensitive layer that is sensitized by irradiation with actinic rays is provided on a metal layer formed on the surface of a substrate, and the photosensitive layer is image-wise exposed and then developed to form a resist image. , followed by etching the metal layer to form a metal pattern, and finally stripping the photoresist image. Moreover, as the manufacturing method of the next-generation metal wiring board, ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C18/18H05K3/18H05K3/38
CPCH05K3/387C23C18/1653C23C18/2086C23C18/30H05K3/022H05K2201/0154H05K2201/0209
Inventor 安居院绫子塚本直树河野贵胤
Owner FUJIFILM CORP