A kind of manufacturing method of high-quality titanium-aluminum alloy target
A titanium-aluminum alloy, high-quality technology, applied in the direction of metal material coating process, ion implantation plating, coating, etc., can solve the problems of unavoidable macroscopic shrinkage and porosity, low yield, etc., to prevent collapse, no The effect of crucible contamination and alloy composition uniformity
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Embodiment 1
[0059] The titanium-aluminum alloy target prepared in this embodiment is composed of the following elements by weight percentage: Ti 64%, Al 36%.
[0060] The manufacturing method is as follows:
[0061] (1) Ingredients: According to the above alloy composition design, weigh 0-grade sponge titanium and metal aluminum with a purity higher than 99.99%;
[0062] (2) Baking material: Put the weighed raw materials titanium and aluminum into a vacuum oven (vacuum degree of 5000Pa), keep it warm at 140°C for 5h, cool down to 35°C with the furnace, and take it out for use;
[0063] (3) Piezo electrode: Wrap the aluminum block with aluminum foil, divide the titanium sponge into two parts, first pour a part of the titanium sponge into the mold of the four-column electrode pressing machine, then put the aluminum block into the mold, and finally put the The remaining titanium sponge is poured into the mold;
[0064] (3) Piezo electrode: Wrap the aluminum block with aluminum foil, divide...
Embodiment 2
[0073] The titanium-aluminum alloy target prepared in this embodiment is composed of the following elements by weight percentage: Ti 60%, Al 40%.
[0074] The manufacturing method is as follows:
[0075] (1) Ingredients: According to the above alloy composition design, weigh 0-grade sponge titanium and metal aluminum with a purity higher than 99.99%;
[0076] (2) Baking materials: Put the weighed raw materials titanium and aluminum into a vacuum oven (vacuum degree is 5000Pa), keep it warm at 140°C for 4h, cool down to 38°C with the furnace and take it out for use;
[0077] (3) Piezo electrode: Wrap the aluminum block with aluminum foil, divide the titanium sponge into two parts, first pour a part of the titanium sponge into the mold of the four-column electrode pressing machine, then put the aluminum block into the mold, and finally put the The remaining titanium sponge is poured into the mould; the four-column electrode pressing machine is a commercially available product; ...
Embodiment 3
[0086] The titanium-aluminum alloy target prepared in this embodiment is composed of the following elements by weight percentage: Ti 70%, Al 30%.
[0087] The manufacturing method is as follows:
[0088] (1) Ingredients: According to the above alloy composition design, weigh 0-grade sponge titanium and metal aluminum with a purity higher than 99.99%;
[0089] (2) Baking material: Put the weighed raw materials titanium and aluminum into a vacuum oven (vacuum degree of 5000Pa), keep it warm at 145°C for 5h, cool down to 37°C with the furnace, and take it out for use;
[0090] (3) Piezo electrode: The aluminum block is wrapped with aluminum foil, and the titanium sponge is divided into two parts. First, pour a part of the titanium sponge into the mold of the four-column electrode pressing machine, then put the aluminum block into the mold, and finally put the remaining The titanium sponge is poured into the mould; the four-column electrode pressing machine is a commercially avai...
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