Laser-induced double-chamber micropump and fluid micropump drive method thereof

Abstract

The invention discloses a laser-induced double-chamber micropump. The laser-induced double-chamber micropump comprises a pump body with an inner cavity, an elastic pump diaphragm connected with the pump body and used for dividing the inner cavity into a drive cavity and a pump cavity, an optical fiber inserted into the interior of the drive cavity filled with driving liquid, and a one-way flow control device arranged on the pump body and communicated with the pump cavity to control a fluid to enter the pump cavity and flow out of the pump cavity unidirectionally. The micropump has millisecond response time, the frequency and the amplitude of the pump diaphragm can be controlled accurately, the energy utilization rate is high, wireless and remote control can be realized, the service life of the pump diaphragm is long, the type of the pumping working fluid type is not limited, and a brand new idea is provided for solving the drive problem of microfluid. The micropump can be widely applied in the fields such as a micro-injection and microfluidic control system of medicines, bioanalysis, microchemical analysis and detection, micro-electronic device cooling. The invention also discloses a fluid micropump drive method, which applies the laser-induced double-chamber micropump to drive the fluid to flow unidirectionally.

Description

technical field [0001] The invention relates to microfluid drive, supply and control technologies, in particular to a laser-induced double-cavity micropump. The present invention also relates to a fluidic micropump driving method for a laser-induced micropump. Background technique [0002] In the current medical field, the study of brain drug delivery system is of great importance to the treatment of various brain diseases such as central nervous system infection, epilepsy, brain tumor, periodic tablet headache, drug addiction, schizophrenia, stroke and convulsions. meaning. The brain drug delivery system needs to be accurate to the nanoliter and millisecond level of drug delivery requirements, therefore, a microfluidic system is required. [0003] Microfluidic system, also known as microfluidic analysis chip, micro total analysis system (μTAS) or lab on a chip, is an important branch of microelectromechanical system (MEMS). Various functional units such as microchannels,...

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Problems solved by technology

[0007] Among them, the laser shock wave drive, the sacrificial layer of the pump membrane produces a plasma explosion air mass under the laser irradiation to generate a shock wave, so the service life of the pump membrane is limited; the manufacturing process of the piezoelectric driven micropump is complex, the driving voltage is high, and the power consumption is large; the electrostatic force The drive requires a small electrode gap and a complex structure, so the production of the electrostatic micropump is very difficult, the electrostatic drive force is small, and the insulation problem between the two plates requires high processing technology; the electromagnetic drive micropump consumes a lot of energy. , large heat loss, compared with other types of micropumps, the volume is large, which is not conducive to miniaturization; bubble micropumps generally need to be heated during use, so their applications are limited; the disadvantage of shape alloy memory drive is that the deformation of the pump membrane is difficult to control , the driving response time is slow; bimetal driven micropumps and thermopneumatic driven micropumps have low operating frequency, and the flow rate is difficult to increase

[0008] The common feature of these micropumps is that they do not have high requirements for the fluid to be transported, and can transport most types of fluids with high reliability. However, the high-frequency vibration of the driver may cause wear of the pump membrane and valve plate, resulting in fatigue damage and affecting Long service life, complex structure, difficult to miniaturize size, difficult to manufacture, difficult to integrate with other microfluidic components

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