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High-performance sapphire grinding fluid and preparation method thereof

A technology of grinding liquid and sapphire, which is applied in the field of grinding liquid, can solve the problems of low grinding efficiency of the grinding liquid, increase the difficulty of subsequent polishing, and uneven dispersion of the liquid film, so as to improve the grinding processing efficiency, shorten the processing time, and improve product quality. stable effect

Active Publication Date: 2015-05-06
JIANGSU SINO KRYSTALS OPTROINCS
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Due to the large particles of boron carbide, silicon carbide or diamond powder, about 5-100 μm, the traditional dispersant has poor dispersion effect and can only disperse particles ≤1 μm, so it is easy to precipitate, and the grinding efficiency of the prepared grinding liquid is not high. , during the grinding process, the liquid film on the grinding disc is unevenly dispersed, which can easily cause scratches on the wafer, reduce the yield, and increase the difficulty of subsequent polishing

Method used

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  • High-performance sapphire grinding fluid and preparation method thereof
  • High-performance sapphire grinding fluid and preparation method thereof
  • High-performance sapphire grinding fluid and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0027] Prepare six grinds A, B, C, D, E, F:

[0028] Weigh the friction agent, suspending agent, accelerator and water according to the weight ratio, add 0.2 parts of hydroxyethyl cellulose to 35 parts, 40 parts, 45 parts, 50 parts, 55 parts, and 60 parts of water, dissolve completely, and stir Evenly, then add 30 parts of boron carbide with a particle size of 320 mesh (40~50μm), stir to make a suspension, add 30 parts, 25 parts, 20 parts, 15 parts, 10 parts, 5 parts of accelerator, add nitric acid Or adjust the pH value to 7.5 with sodium hydroxide, configure six parts of grinding liquid A, B, C, D, E, F, wherein the accelerator includes polyacrylate, acrylate polymer, ethanolamine, triethanolamine, propylene glycol, polyethylene Alcohol and nonylphenol polyoxyethylene ether, the weight ratio is: polyacrylate: acrylate polymer: ethanolamine: triethanolamine: propylene glycol: polyvinyl alcohol: nonylphenol polyoxyethylene ether=0.6:6:1: 1:2:3:1.

[0029] Grind the prepared ...

Embodiment 2

[0034] Prepare six grinds A, B, C, D, E, F:

[0035] Weigh friction agent, suspending agent, accelerator and water according to the weight ratio, add 3 parts of hydroxyethyl cellulose to 37 parts, 42 parts, 47 parts, 52 parts, 57 parts, and 62 parts of water, dissolve thoroughly, and stir Evenly, then add 30 parts of boron carbide with a particle size of 320 mesh (40~50μm), stir to make a suspension, add 30 parts, 25 parts, 20 parts, 15 parts, 10 parts, 5 parts of accelerator, add nitric acid Or adjust the pH value to 7.5 with sodium hydroxide, configure six parts of grinding liquid A, B, C, D, E, F, wherein the accelerator includes polyacrylate, acrylate polymer, ethanolamine, triethanolamine, propylene glycol, polyethylene Alcohol and nonylphenol polyoxyethylene ether, the weight ratio is: polyacrylate: acrylate polymer: ethanolamine: triethanolamine: propylene glycol: polyvinyl alcohol: nonylphenol polyoxyethylene ether=0.6:6:1: 1:2:3:1.

[0036] Grind the prepared sample...

Embodiment 3

[0041] Prepare six grinds A, B, C, D, E, F:

[0042]Weigh friction agent, suspending agent, accelerator and water according to the weight ratio, add 5 parts of hydroxyethyl cellulose to 35 parts, 40 parts, 45 parts, 50 parts, 55 parts, and 60 parts of water, dissolve thoroughly, and stir Evenly, then add 30 parts of boron carbide with a particle size of 320 mesh (40~50μm), stir to make a suspension, add 30 parts, 25 parts, 20 parts, 15 parts, 10 parts, 5 parts of accelerator, add nitric acid Or adjust the pH value to 7.5 with sodium hydroxide, configure six parts of grinding liquid A, B, C, D, E, F, wherein the accelerator includes polyacrylate, acrylate polymer, ethanolamine, triethanolamine, propylene glycol, polyethylene Alcohol and nonylphenol polyoxyethylene ether, the weight ratio is: polyacrylate: acrylate polymer: ethanolamine: triethanolamine: propylene glycol: polyvinyl alcohol: nonylphenol polyoxyethylene ether=0.6:6:1: 1:2:3:1.

[0043] Grind the prepared sample ...

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Abstract

The invention discloses a high-performance sapphire grinding fluid and a preparation method thereof. The grinding fluid is prepared from the following components in parts by weight: 3-60 parts of abrasive agent, 0.2-5 parts of suspending agent, 5-30 parts of accelerant and 12-70 parts of water; the pH value of the grinding fluid ranges from 7 to 13. The preparation method comprises the following steps: (1) weighing the abrasive agent, the suspending agent, the accelerant and the water according to the weight proportions; (2) dissolving the suspending agent into the water thoroughly and stirring evenly; (3) dispersing the abrasive agent in the liquid of the step (2) to form a suspension; (4) adding the accelerant to the suspension and stirring evenly; (5) regulating the pH value to the range of 7-13. The high-performance sapphire grinding fluid is good in suspension property, not easy to precipitate, high in removal rate and long in cyclic service life; the grinding processing efficiency can be greatly improved and the cost can be reduced.

Description

technical field [0001] The invention relates to the field of grinding fluid, in particular to a high-efficiency sapphire grinding fluid and a preparation method thereof. Background technique [0002] The grinding of hard materials such as sapphire in the current market mainly uses cast iron discs or copper discs, and the grinding liquid mainly uses large particles of boron carbide, silicon carbide or diamond powder as abrasives, and a certain proportion of water and dispersants are added. Due to the large particles of boron carbide, silicon carbide or diamond powder, about 5-100 μm, the traditional dispersant has poor dispersion effect and can only disperse particles ≤1 μm, so it is easy to precipitate, and the grinding efficiency of the prepared grinding liquid is not high. , During the grinding process, the liquid film on the grinding disc is unevenly dispersed, which can easily cause scratches on the wafer, reduce the yield, and increase the difficulty of subsequent polis...

Claims

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Application Information

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IPC IPC(8): C09G1/02
CPCC09G1/02
Inventor 沈建新周涛
Owner JIANGSU SINO KRYSTALS OPTROINCS
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