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High thermal shock resistance alumina ceramic ring for polysilicon reduction furnace and preparation method thereof

A technique for alumina ceramic rings and reduction furnaces, which is applied in the fields of ceramic rings and their preparation, highly thermal-shock-resistant alumina ceramic rings for polysilicon reduction furnaces and their preparations, and can solve the problems of high cost of use, burnout of PTFE sleeves, and thermal shock resistance. Poor performance and other problems, to achieve the effect of improving thermal shock resistance, improving work efficiency, and good thermal shock resistance

Inactive Publication Date: 2016-08-03
景德镇晶达新材料有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The surface of quartz material is easy to accumulate silicon, which has poor thermal shock resistance and poor heat insulation effect on radiant heat, which may easily cause the PTFE sleeve outside the electrode to be burned. Ordinary 95 alumina ceramics have poor thermal shock resistance and can only be used once or twice. The use cost is high, the unit cost of silicon nitride ceramics is high, and the surface is easy to accumulate silicon, which will cause short circuit and spark damage to the electrode, seriously affecting production efficiency

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] Weighed according to weight percentage: 79.3% of α-alumina fine powder, 6% of tabular corundum, 10% of fused mullite powder, 0.2% of magnesium oxide, 2% of kaolin, 0.5% of calcium carbonate, and 2% of zirconia.

[0024] Put the weighed powder into a high-speed stirring mill, add HX-40Y ceramic dispersant, stir for 1 hour, then add PVA binder, silicone defoamer, etc., and grind for 2 hours, the dispersion medium is Ionized water, the grinding medium is high-purity alumina ceramic balls or zirconia ceramic balls to obtain a uniformly mixed slurry. The slurry is spray-dried and granulated to obtain a granulated material, and the granulated material is formed by cold isostatic pressing at a forming pressure of 100 MPa to obtain a blank body. The obtained blank body is processed into a ceramic ring with an inner diameter of 73mm, a thickness of 17mm, and a length of 30mm by a CNC precision lathe. The surface of the processed blank body is modified to remove burrs and machini...

Embodiment 2

[0029] Weighed according to weight percentage: 84.6% of α-alumina fine powder, 5% of tabular corundum, 8% of fused mullite powder, 0.1% of magnesium oxide, 1% of kaolin, 0.3% of calcium carbonate, and 1% of zirconia.

[0030] Put the weighed powder into a high-speed stirring mill, add HX-40Y ceramic dispersant, stir for 1 hour, then add PVA binder, silicone defoamer, etc., and grind for 2 hours, the dispersion medium is Ionized water, the grinding medium is high-purity alumina ceramic balls or zirconia ceramic balls to obtain a uniformly mixed slurry. The slurry is spray-dried and granulated to obtain a granulated material, and the granulated material is formed by cold isostatic pressing at a forming pressure of 100 MPa to obtain a blank body. The obtained blank body is processed into the shape and size as in Example 1 by a CNC precision lathe, and the surface of the processed blank body is modified to remove burrs and turning lines, and then placed in a high-temperature kiln ...

Embodiment 3

[0035] Weigh respectively according to weight percentage: 70.3% of α-alumina fine powder, 10% of tabular corundum, 15% of fused mullite powder, 0.2% of magnesium oxide, 2% of kaolin, 0.5% of calcium carbonate, and 2% of zirconia.

[0036] Put the weighed powder into a high-speed stirring mill and add HX-40Y ceramic dispersant. After stirring for 1 hour, add PVA binder, silicone defoamer, etc., and grind for 2 hours. The grinding medium is high-purity Alumina ceramic balls or zirconia ceramic balls to obtain a uniformly mixed slurry. The slurry is spray-dried and granulated to obtain a granulated material, and the granulated material is formed by cold isostatic pressing at a forming pressure of 100 MPa to obtain a blank body. The obtained blank body is processed into the shape and size as in Example 1 by a CNC precision lathe, and the surface of the processed blank body is modified to remove burrs and turning lines, and then placed in a high-temperature kiln for sintering. 170...

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Abstract

The invention discloses an alumina ceramic ring having high thermal shock resistance and used for a polycrystalline silicon reduction furnace as well as a preparation method. The alumina ceramic ring comprises components in percentage by weight as follows: 67.7%-84.6% of alpha-alumina micro powder, 5%-10% of tabular corundum, 8%-15% of electro-fused mullite powder, 0.1%-0.5% of magnesium oxide, 1%-3% of kaolin, 0.3%-0.8% of calcium carbonate and 1%-3% of zirconium oxide. The alumina ceramic ring has good insulativity, high strength, high-temperature resistance and good thermal shock resistance, is resistant to acid-base corrosion and can meet the environment use requirements of the polycrystalline silicon reduction furnace; the service life of the ceramic ring can be greatly prolonged, and the working efficiency is improved.

Description

technical field [0001] The invention relates to a ceramic ring and a preparation method, in particular to a high thermal shock resistance alumina ceramic ring for a polysilicon reduction furnace and a preparation method, belonging to the technical field of inorganic non-metallic materials. Background technique [0002] Polysilicon reduction furnace is a special equipment for preparing polysilicon material by adopting "improved Siemens method". At present, the most mature technology for polysilicon production at home and abroad is the improved Siemens method, which obtains high-purity polysilicon through the chemical vapor deposition reaction of trichlorosilane and hydrogen under high temperature conditions, and produces a large amount of by-product silicon tetrachloride to be recycled. The most important equipment for preparing polysilicon by this method is the vapor phase deposition reactor (CVCD reactor), also known as the reduction furnace, whose operation control level i...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C04B35/10C04B35/622
Inventor 罗奕惠熊彪
Owner 景德镇晶达新材料有限公司
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