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Method for preparing and purifying monosilane by reactive distillation

The technology of reactive distillation and reactive distillation column is applied in the field of preparation of high-purity elemental silicon raw material silane, which can solve the problem of unbalanced gas-liquid distribution in the distillation column, increase the difficulty of design and manufacture of the distillation column, and reduce the separation of the distillation column. Efficiency and other issues, to achieve the effect of easy recycling, energy saving, high boiling point

Active Publication Date: 2020-01-21
JIANGSU ZHONGNENG POLYSILICON TECH DEV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the reactive distillation method adopted in this patent easily leads to unbalanced gas-liquid distribution in the rectification tower, reduces the separation efficiency of the rectification tower, and increases the difficulty of design and manufacture of the rectification tower

Method used

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  • Method for preparing and purifying monosilane by reactive distillation
  • Method for preparing and purifying monosilane by reactive distillation

Examples

Experimental program
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Effect test

Embodiment 1

[0026]In the trichlorosilane storage tank 1, trichlorosilane is added through the feed pipeline, and the trichlorosilane is transported into the first reaction rectification tower 5 through the pump 2, and the tower top gas passes through the top of the rectification tower 5 After the cooler 4 is cooled, part of the reflux enters the rectification tower 5, and part of it is taken out as a purified dichlorodihydrosilane product, and the chlorosilane mixture containing the ionic liquid in the tower kettle reboiler 3 of the rectification tower 5 is taken out and recovered by a pump , the recovered ionic liquid is added to the rectification tower still 3 again as a supplementary catalyst, dichlorodihydrosilane and trichlorosilane are returned to the raw material storage tank 1 as raw materials, and the silicon tetrachloride dehydrogenation unit is converted into trichlorosilane The hydrogen silicon returns to the raw material storage tank 1 (not involved in this patent, and the gen...

Embodiment 2

[0030] In the trichlorosilane raw material storage tank 1, trichlorosilane is added through the feed pipeline, and the trichlorosilane is transported into the first reactive rectification tower 5 through the pump 2, and the tower top gas passes through the tower of the rectification tower 5 After the top cooler 4 is cooled, part of the reflux enters the rectification tower 5, and part of it is taken out as a purified dichlorodihydrosilane product, and the chlorosilane mixture containing the ionic liquid in the tower kettle reboiler 3 of the rectification tower 5 is taken out by a pump Recovery, the recovered ionic liquid is added to the rectifying tower still 3 again as a supplementary catalyst, dichlorodihydrosilane and trichlorosilane are returned to the raw material storage tank 1 as raw materials, and the silicon tetrachloride dehydrogenation unit is converted into trichlorosilane Hydrogen silicon returns to the raw material storage tank 1 (not involved in this patent, the ...

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Abstract

The invention relates to a method for preparing and purifying monosilane by reactive distillation, which comprises disproportionation reaction of trichlorosilane, a raw material in a first reactive distillation column, and rectifying in the first distillation column to prepare dichlorosilane. The dihydrosilicon is extracted from the top of the column and sent to the second reactive distillation column, and the monosilane product is generated by disproportionation in the bottom of the second distillation column again and extracted from the top of the column by rectification separation in the second distillation column. , which is characterized in that the reaction and separation are coupled, and the two-step catalytic disproportionation obtains monosilane, and the catalyst is an ionic liquid catalyst. The method for preparing and purifying monosilane by using reactive distillation of the present invention can simply and efficiently prepare monosilane, and the materials in the whole process are closed-circuited and recycled, no pollution discharge, and environmental friendliness.

Description

technical field [0001] The invention relates to the preparation of high-purity elemental silicon raw material silane, in particular to a method for preparing and purifying monosilane by reactive distillation. Background technique [0002] Polycrystalline silicon is the main raw material for manufacturing semiconductor devices and photovoltaic solar cells. Due to climate change, the world is actively developing and utilizing various renewable low-carbon energy sources. Due to its cleanness, safety, and abundant resources, solar energy has attracted the most attention among renewable low-carbon energy sources. One way to harness solar energy is by converting it into electricity through the photovoltaic effect. Silicon solar cells are the most commonly employed devices based on the photovoltaic effect. In addition, due to the development of the semiconductor industry and solar cells, the demand for high-purity polysilicon is increasing. [0003] Among the methods of manufact...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C07F7/08C07F7/20
Inventor 陈其国陈文龙于伟华
Owner JIANGSU ZHONGNENG POLYSILICON TECH DEV