Magnetostatic moving field magnetorheological polishing mechanism test device and processing method thereof

Abstract

The invention relates to a magnetostatic moving field magnetorheological polishing mechanism test device and a method. The device comprises a magnetorheological abrasive semi-fixed flexible micro-grinding head generation device, a magnetostatic moving field eccentric conversion device and a polishing disc reverse rotating device; the magnetorheological abrasive semi-fixed flexible micro-grinding head generation device comprises a base, a permanent magnetic pole, a fixed sleeve, a turntable and a polishing disc; the magnetostatic moving field eccentric conversion device includes a gasket, an eccentric sleeve, an inner positioning ring, an angle contact ball bearing and an outer positioning ring; and the polishing disc reverse rotating device comprises an outer gear, a planet gear, an inner gear, a support piece, a fixed disc, a deep groove ball bearing, a mounting shaft and a static piece. The device realizes high-efficiency and constant-pressure ultrasmooth magnetorheological polishing of workpieces under the condition of not updating magnetorheological liquid; the surfaces quality of obtained workpieces is good; the processing efficiency and precision are high; the workpieces have no surface and sub-surface damage; the uniformity degree is high; the material consumption is low; the cost is low; and the device can be applied to processing of various optical elements and semiconductor substrates.

Description

technical field [0001] The invention relates to a static magnetodynamic field magnetorheological polishing mechanism test device and a processing method thereof, in particular to a constant pressure optical element and a semiconductor substrate plane for real-time online trimming of an abrasive semi-fixed magnetorheological flexible micro-grinding head Grinding and polishing device and method. Background technique [0002] With the development of microelectronics, optoelectronics, solar photovoltaic technology and the continuous integration of optics and electronics, the processing precision requirements for hard and brittle material components and optoelectronic components are getting higher and higher. Modern optical lenses, mirrors, functional optoelectronic devices, etc. Optical surfaces not only have surface shape accuracy requirements, but also need to achieve ultra-smooth surfaces and strictly control subsurface damage. With the development of the information industr...

AI Technical Summary

Problems solved by technology

However, after long-term experimental verification, it was found that due to the inherent viscoelasticity of magnetorheological fluid, the micro-grinding head would be pressed down after the workpiece passed through the micro-grinding head and could not be recovered, thus losing the pressure on the workpiece and the polishing effect, and there was a serious loss. The problem of polishing pressure makes it difficult to guarantee the uniformity of the workpiece after processing, and the processing principle and method still need a qualitative breakthrough

Images