Ultrathin high-purity ceramic wafer and preparation process thereof

A preparation process and technology of ceramic sheets, which are applied in the field of ultra-thin high-purity ceramic sheets and their preparation, can solve the problems of serious shrinkage of ultra-thin ceramic sheets, reduced thermal conductivity, and increased number of grain boundaries, and achieve excellent dielectric properties and thermal conductivity. The effect of smooth surface and lower calcination temperature

Active Publication Date: 2016-06-22
SHANTOU UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] The purpose of the present invention is to provide an ultra-thin high-purity ceramic sheet and its preparation process to solve the problems of severe shrinkage, easy deformation, increased number of grain boundaries, and reduced thermal conductivity of ultra-thin ceramic plates during sintering.

Method used

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  • Ultrathin high-purity ceramic wafer and preparation process thereof

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Embodiment 1

[0022] A preparation process of an ultra-thin high-purity ceramic sheet mainly includes the following steps: according to the total amount of 65g of ceramic materials, the pure alumina powder with a median diameter of 2 μm and the pure alumina powder with a median diameter of 120nm are calculated with a volume ratio of 90:10 2 g triolein, 27 g mixed solvent of butanone and absolute ethanol, wherein butanone / absolute ethanol=5 / 4, ball milled for 24 hours. After ball milling, add 3gPVB, a mixture of 2.95gDBP and polyethylene glycol, wherein DBP / polyethylene glycol=3 / 2, and ball mill for 12 hours. Then add 0.05g defoamer, and carry out vacuum defoaming in a vacuum tank for 20min. The resulting slurry had a solids content of 65%. Cast the slurry on a casting machine, accurately set the height of the cutting edge of the casting head, the speed of the steel belt and the temperature of each drying zone, and obtain a thickness of 0.2 mm for the cast ceramic green sheet after drying. ...

Embodiment 2

[0024] A preparation process of an ultra-thin high-purity ceramic sheet mainly includes the following steps: according to the total amount of ceramic material 74g, the pure alumina powder with a median diameter of 3 μm and the pure alumina powder with a median diameter of 200nm are calculated with a volume ratio of 70:30 Add 0.9g of ammonium polyacrylate to 11.6g of water, add 74g of ceramic powder after stirring, and finally add an appropriate amount of ammonia water until the pH value is 10, and ball mill for 24 hours to prepare a water-based ceramic slurry for later use. Stir and mix 8.5g of 48% styrene-acrylic emulsion and 1.5g of 20% polyvinyl alcohol aqueous solution for 2 hours to prepare a mixed binder. Add the above-mentioned mixed binder to the water-based ceramic slurry, add 2.5 g of glycerol, 0.05 g of defoamer and 0.95 g of film-forming aid, and continue ball milling for 10 hours to obtain ceramic slurry. The resulting slurry had a solids content of 70%. The resu...

Embodiment 3

[0026] A preparation process of an ultra-thin high-purity ceramic sheet mainly includes the following steps: according to a total amount of 70 g of ceramic materials, the pure aluminum nitride powder with a median diameter of 1 μm and the pure aluminum nitride powder with a median diameter of 150 nm are calculated with a volume ratio of 75:25. The amount of aluminum powder is weighed separately; add 1.6g triolein, 24g mixed solvent of butanone and absolute ethanol, wherein butanone / absolute ethanol=5 / 4, and ball mill for 24 hours. After ball milling, add 2gPVB, a mixture of 2.35gDBP and polyethylene glycol, wherein DBP / polyethylene glycol=3 / 2, and ball mill for 12 hours. Then add 0.05g defoamer, and carry out vacuum defoaming in a vacuum tank for 20min. The resulting slurry had a solids content of 75%. Cast the slurry on a casting machine, accurately set the height of the cutting edge of the casting head, the speed of the steel belt and the temperature of each drying zone, an...

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Abstract

The invention relates to an ultrathin high-purity ceramic wafer and a preparation process thereof. Ceramic powder of the ceramic wafer is a mixture of micron powder and nanometer powder, and the nanometer powder accounts for 10-30% the volume of the ceramic powder; the median diameter of the micron powder is smaller than or equal to 3.0 microns; the median diameter of the nanometer powder is smaller than or equal to 0.2 micron; the micron powder particles are in contact with one another, and gaps among the micron powder are filled with the nanometer powder; preparation processes of tape casting zone generation and solid phase sintering are adopted, the ceramic powder serves as the solid phase of a sizing agent, and the mass of the ceramic mass accounts for 65% or above of that of the sizing agent; the solid phase sintering temperature is 100 DEG C or above lower than that of the theoretical sintering temperature of the micron powder. According to the ultrathin high-purity ceramic wafer and the preparation process thereof, the mixture of the micron powder and the nanometer powder serves as the ceramic powder, the volume ratio of the micron powder and the nanometer powder is reasonably regulated, and the sintering temperature is lowered without adding a sintering agent; an ultrathin ceramic plate which is flat in surface is prepared through the processes of raising the solid content and raising the sintering temperature, and the ceramic wafer still maintains a high heat-conducting property and does not change the dielectric property.

Description

technical field [0001] The invention relates to an ultra-thin high-purity ceramic sheet and a preparation process thereof, belonging to the field of fine ceramic preparation. Background technique [0002] Fine ceramic substrates are widely used in the fields of integrated circuit packaging, LED substrates, and passive components. The thickness and surface quality of ceramic substrate products have become one of the key technologies in the development of fine ceramics. [0003] Tape casting method is an important process for preparing high-performance ceramic sheet materials. This method is to add solvent, binder, plasticizer, etc. to the powder, and prepare a slurry with moderate viscosity after ball milling, filtration and vacuum defoaming. , and through the scraper and the steel belt, the slurry is cast on the film belt to make a green ceramic belt, and the green ceramic belt is cut according to the required size, and the glue is removed and sintered to prepare a ceramic ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C04B35/10C04B35/581C04B35/622
CPCC04B35/10C04B35/581C04B35/622C04B2235/5436C04B2235/5454
Inventor 张丹王双喜王文君李少杰黄永俊
Owner SHANTOU UNIV
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