Pyrolytic carbon/molybdenum disulfide nanosheet/graphene composite material patterned micro-electrode and micro-processing technology thereof

A molybdenum disulfide and composite material technology, which is applied in metal material coating process, process for producing decorative surface effects, decorative arts and other directions, can solve the problems of difficult micro-devices and effective integration of micro-systems, etc., and achieve good application prospects , good electrochemical performance, the effect of wide source of raw materials

Inactive Publication Date: 2016-10-26
WUHAN UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0003] The technical problem to be solved by the present invention is to provide a simple process, good electrochemical performance, larg

Method used

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  • Pyrolytic carbon/molybdenum disulfide nanosheet/graphene composite material patterned micro-electrode and micro-processing technology thereof
  • Pyrolytic carbon/molybdenum disulfide nanosheet/graphene composite material patterned micro-electrode and micro-processing technology thereof
  • Pyrolytic carbon/molybdenum disulfide nanosheet/graphene composite material patterned micro-electrode and micro-processing technology thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0023] 1) Preparation of molybdenum disulfide nanosheet / graphene material:

[0024] 1.1. Dissolve 0.8g of sodium molybdate dihydrate in 30g of deionized water, stir to obtain a transparent solution, add 6mg of graphene powder to it, and ultrasonicate for 1 hour to obtain a uniform black solution;

[0025] 1.2, add 1.26g of thiourea to the black solution, stir for 30min, then ultrasonic for 30min to obtain the mixed solution;

[0026] 1.3. Transfer the mixed solution to a polytetrafluoroethylene-lined reactor with a volume of 50ml, and conduct a hydrothermal synthesis reaction at 200°C for 24 hours;

[0027] 1.4. Wash the hydrothermally synthesized product 6 times with centrifugation and ethanol. Each time, the centrifugation speed is 10000r / min, and the centrifugation time is 3min. , and then place the centrifuged precipitate in a drying oven and dry at 70°C for 24 hours to obtain a solid product;

[0028] 1.5. Grinding the solid product to obtain molybdenum disulfide nanosh...

Embodiment 2

[0038] 1) Preparation of molybdenum disulfide nanosheet / graphene material:

[0039] 1.1. Dissolve 0.8g of sodium molybdate dihydrate in 60g of deionized water and stir to obtain a transparent solution; add 2mg of graphene powder to it and ultrasonicate for 1 hour to obtain a uniform black solution;

[0040] 1.2, add 1.2g thiourea to the black solution, stir for 30min, and then ultrasonic for 30min to obtain the mixed solution;

[0041] 1.3. Transfer the mixed solution to a polytetrafluoroethylene-lined reactor with a volume of 100ml, and conduct a hydrothermal synthesis reaction at 200°C for 24 hours;

[0042] 1.4. Wash the hydrothermally synthesized product 6 times with centrifugation and ethanol. Each time, the centrifugation speed is 10000r / min, and the centrifugation time is 3min. , and then place the centrifuged precipitate in a drying oven and dry at 70°C for 24 hours to obtain a solid product;

[0043] 1.5. Grinding the solid product to obtain the final product molybd...

Embodiment 3

[0053] 1) Preparation of molybdenum disulfide nanosheet / graphene material:

[0054] 1.1, 0.8g sodium molybdate dihydrate was dissolved in 20g deionized water, and stirred to obtain a transparent solution; 20mg graphene powder was added thereto, and ultrasonic treatment was performed for 1h to obtain a uniform black solution;

[0055] 1.2, add 1.4g thiourea to the black solution, stir for 30min, then ultrasonic for 30min to obtain the mixed solution;

[0056] 1.3. Transfer the mixed solution to a polytetrafluoroethylene-lined reactor with a volume of 50ml, and conduct a hydrothermal synthesis reaction at 200°C for 24 hours;

[0057] 1.4. Wash the hydrothermally synthesized product 6 times with centrifugation and ethanol. Each time, the centrifugation speed is 10000r / min, and the centrifugation time is 3min. , and then place the centrifuged precipitate in a drying oven and dry at 70°C for 24 hours to obtain a solid product;

[0058] 1.5. Grinding the solid product to obtain th...

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Abstract

The invention relates to a pyrolytic carbon/molybdenum disulfide nanosheet/graphene composite material patterned micro-electrode and a micro-processing technology thereof. The pyrolytic carbon/molybdenum disulfide nanosheet/graphene composite material patterned micro-electrode comprises the steps of 1) mixing graphene, sodium molybdate dihydrate, thiourea and water uniformly according to a mass ratio of 1-10:400:600-700:1000-30000, then putting the mixture in a reaction kettle for hydro-thermal synthesis reaction, centrifuging the mixture after subjected to the hydro-thermal synthesis reaction, drying to obtain a solid product, and grinding the solid product to obtain a molybdenum disulfide nanosheet/graphene material; and 2) mixing photo-resist with the molybdenum disulfide nanosheet/graphene uniformly, then coating the mixture on a substrate for drying, then performing ultra-violet lithography, development and washing for the substrate, and finally performing high-temperature pyrolytic reaction to obtain the pyrolytic carbon/molybdenum disulfide nanosheet/graphene composite material patterned micro-electrode. The obtained micro-electrode has good electrochemical performance and has good application foreground in the fields such as micro-sensors and tiny energy storage devices.

Description

technical field [0001] The invention relates to the field of intersecting nanomaterials and micromachining techniques, and more specifically relates to a pyrolytic carbon / molybdenum disulfide nanosheet / graphene composite material patterned microelectrode and a micromachining technique thereof. Background technique [0002] Micro-electromechanical systems (MEMS, Micro Electro Mechanical Systems) developed based on micro-nano technology have been widely used in various fields of society. Among them, carbon-based micro-systems (C-MEMS, carbon Micro Electro Mechanical Systems) have been widely researched and applied to various micro devices and systems because of their precise and controllable microstructure, environmental protection and economy, low equipment requirements, and the process can be fully integrated with existing semiconductor micromachining processes. Molybdenum disulfide layered nanomaterials have high specific surface area, pseudocapacitive activity, high electr...

Claims

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Application Information

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IPC IPC(8): B81C1/00
CPCB81C1/00166
Inventor 何亮杨威郭名浩朱瑞琦麦立强
Owner WUHAN UNIV OF TECH
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