Fully depleted iron electric side gate single nanometer wire near infrared electro photonic detector and preparation method
A technology of electrical detectors and near-infrared light, which is applied in the direction of circuits, electrical components, semiconductor devices, etc., can solve the problems that affect the optical detection performance of devices, high intrinsic carrier concentration, and large dark current of devices, so as to improve the detection ability, Suppress dark current and reduce the effect of dark current
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[0025] The specific embodiments of the present invention will be described in detail below in conjunction with the accompanying drawings:
[0026] The invention develops a fully depleted ferroelectric side grid single nanowire photodetector. The ultra-strong electrostatic field generated by the negative polarization of the P(VDF-TrFE) ferroelectric polymer material completely depletes the intrinsic carriers in the nanowire channel, thus greatly reducing the detector performance without gate voltage. Dark current improves the detection performance of the device.
[0027] Specific steps are as follows:
[0028] 1. InP and CdS nanowires were prepared on P-type Si substrate by chemical vapor deposition (CVD) method. First, a 1nm-thick Au film was thermally evaporated on the Si substrate, and an appropriate amount of high-purity InP (or CdS) powder was placed on a ceramic boat and placed in the center of the quartz tube. The tube furnace around the quartz tube could heat the syst...
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