Integrated biochemical sensor based on rib optical waveguide

Abstract

An integrated biochemical sensor based on rib optical waveguide comprises an MZI (Mach-Zehnder interferometer) detection chip, an optical fiber support, a plurality of polymer cavities and a micro-channel system which are machined on the same SOI (silicon on insulator) silicon wafer as well as photoelectric detector and a detection circuit which are arranged in the polymer cavities. The MZI detection chip comprises the rib optical waveguide, a medium groove, a sample pool, a medium groove beam splitter and a medium groove beam combiner. Optical fiber is coupled with the rib optical waveguide, and the rib optical waveguide is coupled to the photoelectrical detector and the detection circuit. Light transmitted by an input end of the rib optical waveguide is split into two branch light beams by the medium groove beam splitter, the two branch light beams are transmitted along two waveguide arms respectively, one waveguide arm is coupled to the sample pool, the light beam of the waveguide arm is subjected to phase modulation by a sample in the sample pool, the two light beams are combined into an output light beam by the medium groove beam combiner, the photoelectric detector and the detection circuit detect change of light intensity and convert the output light beam into an electrical signal, and the sample in the sample pool is detected. The sensor is easy to machine, compact in structure, high in sensitivity and low in cost.

Description

technical field [0001] The invention relates to the technical field of optical biochemical sensing, in particular to an integrated biochemical sensor based on a ridge optical waveguide. Background technique [0002] With the rapid development of science and technology and the continuous penetration of advanced technologies in related disciplines into the field of biomedicine, the development of biomedical testing technology has become increasingly polarized. On the one hand, various large-scale automated, high-performance, and high-efficiency instruments and equipment have come out one after another, which has greatly improved the work efficiency of laboratory analysis and testing; on the other hand, the miniaturization, portability, easy operation, and timely results of experimental instruments Accuracy, and a new biomedical testing model based on it, namely Point of Care Testing (POCT). [0003] Most integrated biochemical sensors have long interferometric structures, low...

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Problems solved by technology

[0003] Most integrated biochemical sensors have long interferometric structures, low coupling efficiency, and are not easy to integrate

In general, in order to reduce radiation loss, MZI sensors adopt a small-angle Y-shaped branch structure. In order to obtain ideal phase modulation results, a large overall size is required; sub-micron waveguide MZI sensors usually require grating coupling, which cannot be directly Using end-face coupling, the coupling efficiency is low; when the waveguide is in contact with the sample, it is usually directly soaked, which is not conducive to the integration of the system on chip

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