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Low-friction-coefficient MoS2 based metal composite solid lubricating film

A low friction coefficient, solid lubrication technology, applied in metal material coating process, vacuum evaporation plating, coating and other directions, can solve the problems of large surface roughness, poor wear resistance, film peeling failure, etc. Improved overall wear resistance and moisture resistance, enhanced overall mechanical properties, and low processing costs

Inactive Publication Date: 2018-03-20
JILIN UNIV
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0005] The preparation methods and existing problems of solid lubricating film are: (1) Dip coating, spraying, brushing, but the lubricating film formed by these coating methods has poor bonding force, poor appearance, poor resistance to special media, and Uniformity is difficult to guarantee, as disclosed in Chinese patent CN03127698.9, a method for preparing a solid lubricating film applied to automobile spline shaft parts; (2) electrodeposition method, which often has the problem of too slow deposition rate; (3) Ion plating method, but ion plating will deposit a large number of large particles on the surface of the workpiece, resulting in a large surface roughness of the film layer, and the particles wrapped inside will easily lead to the peeling failure of the film layer, which will affect the wear resistance of the film layer and cannot be completely Meet the needs of long-life solid lubrication equipment and instruments; (4) physical vapor deposition method, the lubricating film prepared by this method has the advantages of good bonding force, uniform film layer, moderate deposition rate, dense film layer, etc., but there are still many repeated After use, the internal stress between the solid lubricating film and the substrate increases, and the solid lubricating film is still good. The problem that the substrate has been oxidized, such as a co-sputtered solid lubricating film disclosed in Chinese patent 94107544.3
[0007] Therefore, in view of the above problems, it is necessary to improve the composition system of molybdenum disulfide solid lubricating film combined with metal additives to solve the problems of poor wear resistance and harsh use environment of molybdenum disulfide-based solid lubricating film in use, and to provide molybdenum disulfide-based solid lubricating film The possibility of using the film in multiple occasions and prolonging the service life of the film

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0042] A low friction coefficient MoS 2 Base metal composite solid lubricating film, its composition is: Cu13.74at%, MoS 2 margin. The film thickness was 2.6 μm.

[0043] The prepared composite solid lubricating film has a compact structure and looks like a mirror surface when observed by naked eyes. The microscopic morphology of the film is as figure 1 As shown, the surface of the film is about 10-100nm granular without cracks; the cross-sectional morphology of the film is as follows figure 2 As shown in , the cross-section is in the shape of a compact columnar column with a certain growth direction.

[0044] The film was passed through Cu metal target and MoS 2 Target co-sputtering, the preparation method is:

[0045] (1) Carry out surface polishing, acetone and alcohol ultrasonic cleaning and drying to the monocrystalline silicon substrate;

[0046] (2) Set the process parameters, the background vacuum is 5×10 -4 Pa, the protective gas is argon, the working pressur...

Embodiment 2

[0051] A low friction coefficient MoS 2 The metal-based composite solid lubricating film has the same composition as in Example 1, and the film thickness is 0.3 μm.

[0052] The preparation method is the same as that of Example 1 except that the Cu metal target in step (3) uses a 20W DC sputtering target power supply, and the thickness of the pre-bonding layer is 29nm.

Embodiment 3

[0054] A low friction coefficient MoS 2 The metal-based composite solid lubricating film has the same composition as in Example 1, and the film thickness is 2 μm.

[0055] The preparation method is the same as that of Example 1 except that the Cu metal target in step (3) uses a 40W DC sputtering target power supply, and the thickness of the pre-bonded layer is 31nm.

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Abstract

The invention discloses a low-friction-coefficient MoS2 based metal composite solid lubricating film. The low-friction-coefficient MoS2 based metal composite solid lubricating film consists of the following components in atomic percentage: 2at%-38at% of Cu, 0-12at% of Al and the balance of MoS2. A preparation method for the low-friction-coefficient MoS2 based metal composite solid lubricating filmcomprises the following steps of: pre-depositing a Ti or Al pre-combined layer on the surface of a substrate before magnetron sputtering and coating; and performing magnetron sputtering on a metal target and a MoS2 target, thereby obtaining the low-friction-coefficient MoS2 based metal composite solid lubricating film. The low-friction-coefficient MoS2 based metal composite solid lubricating filmdisclosed by the invention improves a composition system of combining a molybdenum disulfide solid lubricating film and a metal additive, solves the problem that the molybdenum disulfide solid lubricating film is relatively poor in wear resistance and is harsh in operating environment in use of the molybdenum disulfide solid lubricating film, provides multi-occasion using possibility of the molybdenum disulfide based film, and prolongs the service life of the film.

Description

technical field [0001] The invention relates to the field of metal coating, in particular to a low friction coefficient MoS 2 base metal composite solid lubricating film. Background technique [0002] In order to prevent and protect the friction surface from damage and reduce its friction and wear during relative movement, the powder or film solid used on the surface is called solid lubricant. Solid lubricating film is used in places where lubricating grease cannot be used, where the environment is harsh and no maintenance is required. It is commonly used in space technology, electrical engineering and automotive engineering. The types of solid lubricants can be divided into sulfides, graphite, soft metals, metal oxides, and metal fluorides according to their raw materials. [0003] Molybdenum disulfide has good anisotropy and low friction coefficient, and S has strong adhesion to metal, so that molybdenum disulfide can be well attached to the metal surface and always play...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/06C23C14/16C23C14/35C23C14/58
CPCC23C14/0688C23C14/165C23C14/352C23C14/5806
Inventor 王文权曹明刘亮
Owner JILIN UNIV
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