Method for manufacturing MEMS atomic cavity of chip atomic clock

Abstract

The invention discloses a method for manufacturing an MEMS atomic cavity of a chip atomic clock. According to the method, a sealed cavity is formed by using a trough-type cover plate and a silicon wafer, so that the rubidium vapor generated by the reaction of barium azide BaN6 and rubidium chloride RbCl is separated from reaction residues, a pure rubidium atomic MEMS cavity is obtained, and the light transmittance of the MEMS atomic cavity is improved; and by accurately controlling the intensity of pressure in an anodic bonding machine, the intensity of pressure in the anodic bonding machine is slightly higher than the intensity of pressure in the MEMS cavity, the phenomenon that the leakage of the rubidium vapor does not occur in a process of second-layer silicon-glass anodic bonding canbe ensured, the rubidium filling amount in the MEMS cavity can be ensured, the contamination of rubidium atoms to a bonding interface can be prevented, the strength of anodic bonding can be increased,and the performance of the MEMS atomic cavity can also be improved. By adopting the manufacturing method disclosed by the invention, impurities in the MEMS atomic cavity can be removed, good light transmittance can be achieved, and the yield of the MEMS atomic cavity can be improved.

Description

technical field [0001] The invention relates to the technical field of atomic clocks, in particular to a method for manufacturing a MEMS atomic cavity of a chip atomic clock. Background technique [0002] Atomic clock on chip is a precision time measurement instrument. Due to its advantages of small size, light weight, low power consumption, and fast start-up speed, it can be widely used in positioning, navigation, communication, military and other fields. [0003] The miniaturization design of the physical system of the chip atomic clock adopts micro-electromechanical processing (MEMS) technology, and processes the micro-atomic gas chamber, micro-optical system, miniature magnetic field coil, magnetic shielding structure and heat preservation structure of the physical system as a whole. The miniature physical system made by MEMS process takes advantage of the heat concentration to reduce power consumption. [0004] In the miniaturization design of CPT atomic frequency stan...

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Problems solved by technology

[0010] In order to solve at least one of the above technical problems, the present invention provides a method for manufacturing a MEMS atomic cavity of a chip atomic clock, which can effectively solve the problems of rubidium vapor leakage and low light transmittance generated during rubidium filling, and greatly improve MEMS Atomic cavity yield

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