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High-activity defluorinating agent and preparation method thereof

A defluorination agent, high activity technology, applied in separation methods, chemical instruments and methods, physical/chemical process catalysts, etc., can solve the problems of high energy consumption, complex operation process, strong corrosion of the reactor, etc., and achieve excellent catalytic performance. , high reactivity, high reactivity effect

Inactive Publication Date: 2018-04-06
方文成
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the high-temperature calcination method requires the calcination temperature to reach above 1000°C to obtain a high decomposition rate of nitrogen trifluoride, and the energy consumption is very high.
The catalytic hydrolysis method to decompose nitrogen trifluoride exhaust gas is to react nitrogen trifluoride and water under the action of a catalyst to generate nitrogen monoxide, nitrogen dioxide and hydrogen fluoride gas [Takubo et al. Catal.Commun., 2009, 11, 147-150 ; Jeon et al., Chem.Commun., 2003,1244-1245], hydrogen fluoride gas meets water and generates hydrofluoric acid, which has a strong corrosive effect on the reactor, and the operation process is complicated

Method used

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Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0017] Wetting alumina particles with copper sulfate solution by incipient wetness impregnation, wetting time for 6 hours, drying at 105°C for 6-12 hours, and roasting at 620°C for 4 hours to obtain a copper oxide-alumina defluorination agent, wherein the The mass percentage of the copper in the copper sulfate solution or the copper acetate solution to the aluminum oxide is 8%. for NF 3 Anhydrous decomposition reaction, NF 3 The decomposition percentage is maintained at about 98%.

[0018] NF 3 Decomposition reaction conditions: take the defluorination agent and put it into the reaction tube, put it into the reaction furnace, and feed the reaction gas 2% NF 3 / 98%He(NF 3 The volume concentration is 2%), and the gas space velocity is 1.0 liters per gram of defluorinating agent per hour. Electric heating to 450 ℃, constant temperature reaction. Testing NF with Gas Chromatograph 3 Residual concentration, calculate NF 3 decomposition rate. NF of the following examples 3 ...

Embodiment 2

[0020] Wet alumina particles with copper sulfate solution by incipient wetness impregnation, wetting time 24 hours, dry at 90°C for 12 hours, and bake at 500°C for 9 hours to obtain a copper oxide-alumina defluorinating agent, wherein the copper sulfate The mass percentage of copper in the solution or the copper acetate solution to the alumina is 5%. for NF 3 Anhydrous decomposition reaction, NF 3 The decomposition percentage is maintained at about 97%.

Embodiment 3

[0022] Wet alumina particles with copper sulfate solution by incipient wetness impregnation method, wetting time for 12 hours, dry at 120°C for 6 hours, and bake at 700°C for 3 hours to obtain a copper oxide-alumina defluorinating agent, wherein the copper sulfate The mass percentage of copper in the solution or the copper acetate solution to the aluminum oxide is 15%. for NF 3 Anhydrous decomposition reaction, NF 3 The decomposition percentage is maintained at about 97%.

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Abstract

The invention belongs to the technical field of catalysts, and in particular relates to a high-activity defluorinating agent and a preparation method thereof. The method comprises the following steps:wetting aluminium oxide particles with a copper sulfate solution or a copper acetate solution through an incipient wetness impregnation method, wherein the wetting time is 12-24h, performing drying at the temperature of 90-120 DEG C for 6-12h, and performing calcination at the temperature of 500 DEG C-700 DEG C for 3-9h to prepare the copper oxide-aluminium oxide defluorinating agent, wherein copper in the copper sulfate solution or the copper acetate solution is 5-15% by mass of aluminum oxide. The defluorinating agent prepared by the method provided by the invention has the outstanding characteristics that the raw materials are cheap and easy to obtain, the preparation process is simple, and the preparation process parameters are easy to control; and the defluorination agent is used todecompose a nitrogen trifluoride waste gas discharged in the electronic industry process, and has high reaction activity and wide application.

Description

technical field [0001] The invention belongs to the technical field of catalysts, and in particular relates to a highly active defluorinating agent and a preparation method thereof. Background technique [0002] Human-made emissions of greenhouse gases lead to global warming, which has aroused widespread concern. Nitrogen trifluoride is an important greenhouse gas with a greenhouse effect potential of CO 2 17,200 times of that, and the retention time is about 740 years. Nitrogen trifluoride is a plasma etching gas and cleaning gas used in the electronics industry. If the used nitrogen trifluoride waste gas is discharged directly into the atmosphere without treatment, it will cause serious harm to the ecological environment. [0003] Existing treatment methods for nitrogen trifluoride waste gas include high-temperature calcination, catalytic hydrolysis, and anhydrous decomposition. Among them, the high-temperature calcination method requires the calcination temperature to ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): B01D53/86B01D53/68B01J23/72
CPCB01D53/8659B01D2255/40B01D2257/204B01J23/72
Inventor 方文成
Owner 方文成