Soft abrasive fixing mould of polished tantalum-lithium wafer and manufacturing method of soft abrasive fixing mould
A lithium tantalate, soft technology, applied in abrasives, grinding/polishing equipment, chemical instruments and methods, etc., can solve the problems of low polishing efficiency and high cost, achieve low processing roughness, improve processing quality, and improve polishing effect good effect
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[0022] The present invention will be further explained below.
[0023] Reference Figure 1 ~ Figure 3 , A soft abrasive fixed abrasive tool for polishing lithium tantalate wafers, the preparation of the soft abrasive fixed abrasive raw material: nano silica 40%-60%, binder 20%-40%, curing agent 10 %-15%, oxidant 5%-10%, deionized water 10%-15% and alkaline pH regulator 5%-10%.
[0024] Further, the adhesive is magnesium oxide.
[0025] Furthermore, the curing agent is magnesium chloride, phenolic-acetal resin or phenolic-epoxy resin.
[0026] Furthermore, the particle size of the nano-silica is 70 ~ 90nm.
[0027] The oxidant is calcium hypochlorite, oxo acid salt, trivalent cobalt salt or potassium dichromate, all of which are nano-sized powder particles.
[0028] A method for making soft abrasive fixed abrasive tools for polishing lithium tantalate wafers, adding a curing agent to deionized water and stirring to dissolve it, and then adding a bonding agent, nano silica, an oxidizing ...
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