Soft abrasive fixing mould of polished tantalum-lithium wafer and manufacturing method of soft abrasive fixing mould

Abstract

Disclosed is a soft abrasive fixing mould of a polished tantalum-lithium wafer and a manufacturing method of the soft abrasive fixing mould. The soft abrasive fixing mould comprises 40-60% of nano-silica, 20-40% of binder, 10-15% of curing agent, 5-10% of oxidant, 10-15% of deionized water and 5-10% of alkaline PH regulator. The manufacturing method of the soft abrasive fixing mould of the polished tantalum-lithium wafer comprises the steps that the curing agent is added into in the deionized water, stirring is conducted to make the curing agent dissolve, then the binder, nano-silica, the oxidant and the alkaline ph regulator are added, and even stirring is conducted; the prepared ingredients are hot-formed in the mould, and hot curing is completed after demoulding; and the upper and lowerend surfaces of the mould are trimmed, and the smoothness and parallelism of the upper and lower end surfaces of the mould are ensured. The soft abrasive fixing mould is good in processing surface quality, high in processing efficiency and low in production cost.

Description

technical field [0001] The invention relates to an abrasive tool, especially a soft abrasive fixed abrasive tool for polishing a lithium tantalate wafer and a manufacturing method thereof. Background technique [0002] Lithium tantalate is a chemical substance with the chemical formula LiTaO 3 , colorless or pale yellow crystals. Trigonal system, distorted perovskite structure, point group C 6 3v R 3 C , density 7.45g / cm 3 , Mohs hardness 5.5~6.0, dielectric constant 41~53, primary electro-optic coefficient r 12 =7.0×10 -12 m / V, electromechanical coupling coefficient R 15 ≥0.3, ferroelectric crystal, Curie point (665±5)℃, spontaneous polarization 50×10 -6 C / cm 2 , has excellent electro-optical, piezoelectric, electrical and pyroelectric properties, and the pyroelectric coefficient is 2.3×10 -7 C / cm 2 / K. [0003] Lithium tantalate (LiTaO 3 , hereinafter referred to as LT) crystal is a typical single crystal multifunctional material, which has excellent piezoele...

AI Technical Summary

Problems solved by technology

[0005] In order to overcome the shortcomings of low polishing efficiency and high cost of existing lithium tantalate wafers, the present invention provides a soft abrasive fixed abrasive tool for polishing lithium tantalate wafers with good surface quality, high processing efficiency and low production cost and its production method

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