Lithium tantalate narrow-band gas detector and preparation method thereof

A gas detector, lithium tantalate technology, applied in the field of gas detection, can solve the problems of high cost, difficult packaging, no wavelength selectivity, etc., and achieve the effect of low cost, high absorption and high sensitivity

Inactive Publication Date: 2018-07-10
HUAZHONG UNIV OF SCI & TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0005] In view of the above defects or improvement needs of the prior art, the present invention provides a lithium tantalate narrow-band gas detector and its preparation method, thereby solvi

Method used

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  • Lithium tantalate narrow-band gas detector and preparation method thereof
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  • Lithium tantalate narrow-band gas detector and preparation method thereof

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Embodiment 1

[0038] Electron beam evaporation was used to grow a gold back plate and a lower electrode on the upper surface and lower surface of a lithium tantalate wafer respectively, and a dielectric layer was grown on the upper surface of the gold back plate by magnetron sputtering; a PMMA positive electrode was spin-coated on the upper surface of the dielectric layer. Glue, the speed of spin coating is 1500rpm, dry at 150 ℃ for 2min, then carry out exposure and development treatment successively, the electric current of described exposure is 2nA, obtain the photoresist layer with disc structure, in the photoresist layer A layer of gold was grown by electron beam evaporation, and then peeled off with acetone to obtain an antenna array. Then, the lower electrode was fixed on the silicon base with four quarter silicon pillars and packaged to obtain a lithium tantalate narrow-band gas detector.

[0039] Wherein, the antenna in the antenna array is a disc gold antenna, the diameter of the di...

Embodiment 2

[0041] Use magnetron sputtering to grow a gold back plate and a lower electrode on the upper surface and lower surface of a lithium tantalate wafer, and use chemical vapor deposition to grow a dielectric layer on the upper surface of the gold back plate; spin-coat PMMA on the upper surface of the dielectric layer. Glue, the speed of spin coating is 2500rpm, dry at 100 ℃ for 4min, then carry out exposure and development treatment successively, the electric current of described exposure is 4nA, obtain the photoresist layer with the disc structure, in the photoresist layer A layer of gold is grown by electron beam evaporation, and then peeled off with isopropanol to obtain an antenna array. Then, the lower electrode is fixed on the silicon base with four quarter silicon pillars and packaged to obtain a lithium tantalate narrow-band gas detection. device.

[0042] Wherein, the diameter of the disk gold antenna is 940nm, the thickness of the disk gold antenna is 50nm, the distance ...

Embodiment 3

[0044] Use magnetron sputtering to grow a gold back plate and a lower electrode on the upper surface and lower surface of a lithium tantalate wafer, and use chemical vapor deposition to grow a dielectric layer on the upper surface of the gold back plate; spin-coat PMMA on the upper surface of the dielectric layer. The speed of spin coating is 2000rpm, and it is dried at 120°C for 3min, and then exposure and development are performed sequentially. The current of the exposure is 3nA, and a photoresist layer with a disc structure is obtained. A layer of gold is grown by electron beam evaporation and stripped with deionized water to obtain an antenna array, and then the lower electrode is fixed on the silicon base with four quarter silicon pillars and packaged to obtain a lithium tantalate narrow-band gas detection device.

[0045] Wherein, the diameter of the disk gold antenna is 1290nm, the thickness of the disk gold antenna is 50nm, the distance between the centers of two adjac...

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Abstract

The invention discloses a lithium tantalate narrow-band gas detector and a preparation method thereof, and belongs to the field of gas detection. The lithium tantalate narrow-band gas detector sequentially comprises a lower electrode, a lithium tantalate wafer, a gold back plate, a dielectric layer and an antenna array from bottom to top, wherein the antenna array comprises a plurality of antennasdistributed in an array manner and is used for absorbing light, the dielectric layer is used for making the absorbed light resonate so as to obtain electromagnetic energy, the gold back plate is usedfor converting the electromagnetic energy into Joule heat, the lithium tantalate wafer is used for absorbing the Joule heat to release positive and negative charges, the lower electrode is used for absorbing the negative charges, the gold back plate is used for absorbing the positive charges, and the detector obtains electrical signals according to the positive and negative charges so as to detect the concentration and the type of the gas according to the electrical signals. The lithium tantalate narrow-band gas detector of the present invention has advantages of wavelength selectivity, detection of a variety of gases, and low cost and easy packaging during the simultaneous detection of a variety of gases.

Description

technical field [0001] The invention belongs to the field of gas detection, and more specifically relates to a lithium tantalate narrow-band gas detector and a preparation method thereof. Background technique [0002] The traditional gas detection system is a single gas detection system. This gas detection system is based on NDIR technology. It uses a wide-spectrum light source to irradiate the gas chamber. The gas in the gas chamber absorbs infrared light of a specific band and is filtered by a filter Detected by the detector, and then processed by the filter amplifier circuit, the electrical signal is read out. According to the Beer-Lambert law, it can be obtained that the readout electrical signal is approximately linear with the gas concentration, thereby realizing the calibration and detection of the gas. [0003] However, the traditional gas detection system can only detect a single gas, and multiple filters and multiple detectors need to be added to detect multiple g...

Claims

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Application Information

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IPC IPC(8): G01N27/00
CPCG01N27/00
Inventor 易飞谈小超刘欢甘如雷李君宇杨奥张恒蒋顺
Owner HUAZHONG UNIV OF SCI & TECH
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