Pressure sensor and preparation method thereof

Abstract

The disclosure provides a flexible pressure sensor in a first aspect and provides a preparation method of the flexible pressure sensor in a second aspect. According to the technical scheme, the flexible pressure sensor with a simple structure is prepared by sequentially printing an electrode array on a flexible substrate and coating a pressure-sensitive material in a scraping manner, the use of expensive equipment and complex processes is avoided, and the pressure sensor has the technical effects that the device is simple structure, high in sensitivity and low in cost, and rapid and large-scale preparation can be realized.

Description

technical field [0001] The invention relates to a pressure sensor and a preparation method thereof, in particular to a flexible capacitive pressure sensor and a preparation method thereof. Background technique [0002] A pressure sensor is a device or device that converts a sensed pressure signal into an electrical signal for output according to a certain rule, and is usually composed of a pressure sensitive element and a signal processing unit. Pressure sensors are widely used in industrial automatic control environments. The application fields involve petroleum and petrochemical, aerospace, production automatic control, intelligent buildings, railway transportation, water conservancy and hydropower, electric power, military industry, machine tools, etc., specifically for pressure, height, acceleration, and liquid flow. , flow rate, liquid level, pressure measurement and control. [0003] In 1945, Smith discovered the piezoresistive effect of silicon and germanium, that is...

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Problems solved by technology

[0005] In the prior art of the capacitive pressure sensor with the modified molecular material as the dielectric layer, there are mainly two problems: 1) In order to improve the sensitivity of the sensor, the pressure-sensitive material is usually microstructured, while the prior art In this method, the mask plate is mainly prepared by photolithography and development, and then sputtering or evaporation metal electrodes are formed to form microarray or nanoarray electrode sensors. This process involves expensive equipment, complicated preparation process, limited flexibility in electrode structure design, and is not conducive to It is prepared in a large area, and the process involves many parameters, and the sensitivity of the electrode needs to be improved. Chinese patent application CN107219194A describes a method for preparing a polyelectrolyte composite with a patterned micro-nano structure with stress response by thermal transfer method. The patterning process involves first preparing a polydimethylsiloxane (PDMS) patterned stamp in a patterned silicon substrate culture dish, and then using the PDMS stamp as a template to prepare a patterned micro-nanostructured polyelectrolyte composite by thermal transfer, There are many parameters in the preparation process, and the process is complicated; 2) pressure-sensitive materials or medium layer materials are mostly formed by spin-coating with a glue spreader, such as a sandwich-type flexible capacitive pressure sensor described in the CN106098927A Chinese patent application. The PDMS layer is prepared by the spin coating method, and the spin coating process is easy to cause waste of raw materials and increase the cost

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