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Glass fiber based flexible gallium oxide nano array solar-blind ultraviolet detector and preparation method thereof

An ultraviolet detector and glass fiber technology, applied in the field of photoelectric detectors, can solve the problems of difficult electrode production, weak substrate bonding, poor stability, etc., to improve photoelectric responsivity, promote self-catalytic growth, and strong binding force Effect

Active Publication Date: 2018-11-02
东营睿港招商服务有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

Although there have been experimental reports (patent number: 201710012296.2) on solar-blind ultraviolet photodetectors based on flexible gallium oxide nanobelts, such detectors are based on the transfer of pre-synthesized gallium oxide nanobelts to flexible substrates, which is difficult to make electrodes. Disadvantages such as large size, poor stability, and weak bonding with the substrate

Method used

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  • Glass fiber based flexible gallium oxide nano array solar-blind ultraviolet detector and preparation method thereof
  • Glass fiber based flexible gallium oxide nano array solar-blind ultraviolet detector and preparation method thereof
  • Glass fiber based flexible gallium oxide nano array solar-blind ultraviolet detector and preparation method thereof

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Embodiment 1

[0030] A method for preparing a glass fiber-based flexible gallium oxide nano-array sun-blind ultraviolet detector, the steps are as follows:

[0031](1) Clean the glass fiber cloth substrate. The cleaning process is as follows: soak the substrate in acetone, ethanol, and deionized water for 10 minutes, then rinse it with deionized water after taking it out, and finally wash it with dry N 2 Blow dry and set aside;

[0032] (2) Place the glass fiber cloth substrate on the heating stage, set the temperature of the heating stage to 100°C, place a grain of Ga metal on the glass fiber cloth substrate, wait for the gallium metal to melt, use the glass slide to dissolve the liquid Ga metal Embossed into a sheet, after cooling, obtain a Ga metal sheet / glass fiber cloth substrate for use;

[0033] (3) Ga 2 o 3 The target is placed on the target stage of the magnetron sputtering deposition system, and the Ga metal sheet / glass fiber cloth substrate obtained in step 2) is fixed on the ...

Embodiment 2

[0040] The difference between this embodiment and Embodiment 1 is that in step (4), the annealing temperature of the Ga metal sheet / glass fiber cloth substrate is 450° C., and the annealing time is 25 minutes; 2 o 3 When the nanocolumn array is used, the heating temperature of the glass fiber cloth substrate is 700°C, and the sputtering power is 60W. Specifically, the preparation method of the present embodiment is as follows:

[0041] A method for preparing a glass fiber-based flexible gallium oxide nano-array sun-blind ultraviolet detector, the steps are as follows:

[0042] (1) Clean the glass fiber cloth substrate. The cleaning process is as follows: soak the substrate in acetone, ethanol, and deionized water for 10 minutes, then rinse it with deionized water after taking it out, and finally wash it with dry N 2 Blow dry and set aside;

[0043] (2) Place the glass fiber cloth substrate on the heating stage, set the temperature of the heating stage to 100°C, place a grai...

Embodiment 3

[0048] The difference between this embodiment and Embodiment 1 is that in step (4), the annealing temperature of the Ga metal sheet / glass fiber cloth substrate is 450° C., and the annealing time is 25 minutes; The pressure is 0.9Pa; the heating temperature of the glass fiber cloth substrate is 750° C., and the sputtering power is 70W. All the other are identical with embodiment 1, detail is as follows:

[0049] A method for preparing a glass fiber-based flexible gallium oxide nano-array sun-blind ultraviolet detector, the steps are as follows:

[0050] (1) Clean the glass fiber cloth substrate. The cleaning process is as follows: soak the substrate in acetone, ethanol, and deionized water for 10 minutes, then rinse it with deionized water after taking it out, and finally wash it with dry N 2 Blow dry and set aside;

[0051] (2) Place the glass fiber cloth substrate on the heating stage, set the temperature of the heating stage to 100°C, place a grain of Ga metal on the glass...

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Abstract

The invention discloses a glass fiber based flexible gallium oxide nano array solar-blind ultraviolet detector and a preparation method thereof. The glass fiber based flexible gallium oxide nano arraysolar-blind ultraviolet detector comprises a glass fiber cloth substrate, a beta-Ga2O3 thin film arranged on the glass fiber cloth substrate, a beta-Ga2O3 nano column array arranged above the beta-Ga2O3 thin film and a Ti / Au thin film interdigital electrode array arranged above the beta-Ga2O3 nano column array, wherein the beta-Ga2O3 thin film is positioned between the glass fiber cloth substrateand the beta-Ga2O3 nano column array; and the glass fiber cloth substrate is bendable and foldable. The MSM type Ti / Au / beta-Ga2O3 / Ti / Au nano array flexible solar-blind ultraviolet detector device hasthe advantages of stable and uniform thickness, flexibility, large-area preparation, high repeatability and the like, and has great application prospects in the fields of wearable equipment, ultraviolet detection and intelligent textiles.

Description

technical field [0001] The invention belongs to the technical field of photodetectors, in particular to a glass fiber-based flexible gallium oxide nano-array sun-blind ultraviolet detector. technical background [0002] Because high-voltage line corona, space, missile plume and flames all contain ultraviolet radiation, ultraviolet detection technology is widely used in military, scientific research, aerospace, communication electronics and many other fields. β-Ga 2 o 3 It is a wide-bandgap deep-ultraviolet semiconductor material with solar-blind characteristics, which can detect 200-280nm ultraviolet light, but has no response to ultraviolet rays in sunlight. This kind of material is used for outdoor high-voltage line corona, ultraviolet light communication and Fields such as fire monitoring are of great advantage without interference from sunlight. [0003] With the improvement of people's demand for electronic equipment, the application of wearable electronic equipment ...

Claims

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Application Information

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IPC IPC(8): H01L31/0224H01L31/09H01L31/18C23C14/02C23C14/04C23C14/08C23C14/16C23C14/35
CPCC23C14/025C23C14/042C23C14/08C23C14/165C23C14/35H01L31/0224H01L31/09H01L31/18Y02P70/50
Inventor 陈谦
Owner 东营睿港招商服务有限责任公司
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