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A kind of multi-layer multi-component nano-composite self-lubricating hard coating and its preparation method and application

A nano-composite, hard coating technology, applied in the coating, metal material coating process, superimposed layer plating, etc., can solve the problems of low metal ionization rate, poor film-base bonding force, and poor coating surface quality etc. to achieve the effects of high hardness, high temperature wear resistance and low friction coefficient

Active Publication Date: 2020-04-17
GUANGDONG UNIV OF TECH
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Among them, the arc ion plating technology has the advantages of high metal ionization rate, dense film layer and strong adhesion, which is suitable for the deposition and preparation of industrial large-area workpiece coatings, but the surface quality of the prepared coatings is poor, and the multi-metal droplets and The internal stress of the film is large; while the surface of the coating prepared by magnetron sputtering deposition technology is relatively smooth, without obvious large particle defects, but the metal ionization rate is low, resulting in poor bonding force of the film base, and the coating is easy to peel off

Method used

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  • A kind of multi-layer multi-component nano-composite self-lubricating hard coating and its preparation method and application
  • A kind of multi-layer multi-component nano-composite self-lubricating hard coating and its preparation method and application
  • A kind of multi-layer multi-component nano-composite self-lubricating hard coating and its preparation method and application

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0031] (1) Fix the pretreated substrate base on the workpiece turret in the coating chamber, adjust the rotation speed of the workpiece turret to 3rpm, make the substrate face the target surface, adjust the vertical target base distance to 4cm, and the horizontal target base At a distance of 120cm, turn on the heater to raise the temperature to 200°C, and pre-pump the background vacuum to 5.0×10 -3 Pa;

[0032] (2) Open the Ar gas flow valve, adjust the air pressure to 1.8Pa, turn on the DC pulse bias power supply, adjust the substrate bias voltage to -1000V, the duty cycle is 40%, the frequency is 80kHz, and the cavity is cleaned by glow sputtering for 30 minutes;

[0033] (3) Reduce the bias voltage of the substrate to -800V, adjust the Ar pressure to 0.5Pa, turn on the Cr arc target, adjust the target current to 100A, and bombard the substrate with high-energy Cr ions for 2 minutes to generate pseudo-metallurgical interface bonding and improve the bonding force of the film ...

Embodiment 2

[0041] (1) Fix the pretreated substrate base on the workpiece turret in the coating chamber, adjust the rotation speed of the workpiece turret to 3rpm, make the substrate face the target surface, adjust the vertical target base distance to 10cm, and the horizontal target base At a distance of 120cm, turn on the heater to raise the temperature to 200°C, and pre-pump the background vacuum to 5.0×10 -3 Pa;

[0042] (2) Open the Ar gas flow valve, adjust the air pressure to 1.8Pa, turn on the DC pulse bias power supply, adjust the substrate bias voltage to -1000V, the duty cycle is 40%, the frequency is 80kHz, and the cavity is cleaned by glow sputtering for 30 minutes;

[0043] (3) Reduce the bias voltage of the substrate to -800V, adjust the Ar pressure to 0.5Pa, turn on the Cr arc target, adjust the target current to 100A, and bombard the substrate with high-energy Cr ions for 2 minutes to generate pseudo-metallurgical interface bonding and improve the bonding force of the film...

Embodiment 3

[0051] (1) Fix the pretreated substrate base on the workpiece turret in the coating chamber, adjust the rotation speed of the workpiece turret to 3rpm, make the substrate face the target surface, adjust the vertical target base distance to 16cm, and the horizontal target base At a distance of 120cm, turn on the heater to raise the temperature to 200°C, and pre-pump the background vacuum to 5.0×10 -3 Pa;

[0052] (2) Open the Ar gas flow valve, adjust the air pressure to 1.8Pa, turn on the DC pulse bias power supply, adjust the substrate bias voltage to -1000V, the duty cycle is 40%, the frequency is 80kHz, and the cavity is cleaned by glow sputtering for 30 minutes;

[0053] (3) Reduce the bias voltage of the substrate to -800V, adjust the Ar pressure to 0.5Pa, turn on the Cr arc target, adjust the target current to 100A, and bombard the substrate with high-energy Cr ions for 2 minutes to generate pseudo-metallurgical interface bonding and improve the bonding force of the film...

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Abstract

The invention belongs to the technical field of preparation of cutter coatings and surface protection coatings, and discloses a multilayer multi-element nano composite self-lubricating hard coating and a preparation method and application thereof. The multilayer multi-element nano composite self-lubricating hard coating comprises a Cr bombardment implant layer, a CrN transition layer, an AlTiN hard core layer and a MoVCuN surface lubricating layer which are deposited on a hard alloy or high-speed steel cutter matrix from bottom to top, wherein the MoVCuN surface lubricating layer is prepared through anode layer ion source-assisted magnetron sputtering deposition; and the MoVCuN surface lubricating layer comprises the following elements by atomic percent: 34 to 44 at.% of Mo, 6 to 10 at.% of V, 0.3 to 0.5 at.% of Cu and 50 to 55 at.% of N. According to the multilayer multi-element nano composite self-lubricating hard coating and the preparation method and application thereof, advantagesof the arc ion plating composite anode layer ion source-assisted magnetron sputtering deposition technology are organically combined, the prepared coating is high in hardness and low in friction coefficient, and a self-lubricating effect of a certain wide-temperature range can be achieved.

Description

technical field [0001] The invention belongs to the technical field of preparation of tool coatings and surface protection coatings, and in particular relates to a multi-layer multi-component nano-composite self-lubricating hard coating and its preparation method and application. Background technique [0002] In recent years, affected by factors such as environmental protection regulations and the rising cost of lubricating oil, cutting tool coatings are gradually developing towards dry solid lubricating materials. At present, the commonly used solid lubricants at medium and low temperatures include graphite, MoS 2 And soft metal Ag, etc., but such one-component coatings usually lose their lubricating properties due to oxidation in high temperature or humid environments. The self-lubricating coating mainly achieves the self-lubricating effect through the gradual diffusion of elemental components to the outer surface of the coating at high temperature, and in-situ oxidation ...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/06C23C14/16C23C14/32C23C14/35
CPCC23C14/0021C23C14/0036C23C14/0641C23C14/16C23C14/325C23C14/35C23C28/30C23C28/347
Inventor 王启民梅海娟张腾飞王瑞
Owner GUANGDONG UNIV OF TECH
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