Composite one-dimensional photonic crystal nanobeam cavity surface plasmon laser
A technology of surface plasmon and dimensional photonic crystals, applied in the structure of optical resonant cavity, the structure of active region, etc., can solve the problems of large loss of resonant cavity, low Q value, difficult output, etc., and achieve the effect of reducing metal loss
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[0026] figure 1 It is a three-dimensional schematic diagram of the coupling cavity structure of the surface plasmon cavity and the one-dimensional photonic crystal nanobeam cavity described in the example. 100 is the gold material gold, h1 is the thickness of the metal, L is its length, w is its width; 102 is the contact layer between the metal and the gain medium, the material is indium phosphide, h2 is its thickness, L is its length, w is its width; 104 is the active gain medium layer, that is, the multi-quantum well layer, the material of the potential well layer is 5nm InGaAsP (Eg=0.816), the barrier layer is 10nm InGaAsP (Eg=1.04), and the thickness is H-h1, L is its length, and w is its width; 106 is a compound one-dimensional photonic crystal nano-beam cavity, including a tapered part (108) that the period and the air hole gradually become larger, and a1 is the minimum period of the air hole; 110 is the period and variable 112 is the high refractive index material indi...
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