A Refractive Index Sensor Based on Magneto-Optical Surface Plasmon Resonance
A surface plasmon and refractive index sensor technology, applied in the field of optical sensing, can solve the problems of insufficient figure of merit of MO-LSPR devices, and achieve the effects of high stability, improved quality factor, and high magneto-optical effect
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
Method used
Image
Examples
Embodiment Construction
[0016] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.
[0017] This embodiment adopts a metal-insulator-metal (MIM) sandwich structure, adopts magnetic oxide Ce:YIG as the magnetic layer material in the magneto-optical surface plasmon resonance sensor, and the whole device includes a titanium nitride film and a magneto-optic insulating layer from bottom to top. , Au nanodisk. The thickness of the titanium nitride film is 120nm, the thickness of the magneto-optical insulating layer is 90nm; the thickness of the gold nano-disk is 25nm, the radius is 72nm, and the square periodic structure is 600nm.
[0018] Its preparation method is as follows:
[0019] The quartz substrate is selected as the substrate, and the film is deposited by pulsed laser deposition, magnetron sputtering and thermal evaporation.
[0020] Step 1. On the double-thrown quartz substrate, 120nm titanium nitride TiN is dep...
PUM
Property | Measurement | Unit |
---|---|---|
thickness | aaaaa | aaaaa |
thickness | aaaaa | aaaaa |
thickness | aaaaa | aaaaa |
Abstract
Description
Claims
Application Information
- R&D Engineer
- R&D Manager
- IP Professional
- Industry Leading Data Capabilities
- Powerful AI technology
- Patent DNA Extraction
Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.
© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com