A kind of in situ growth nanometer based on the surface of non-metallic mineral electrode substrate 2 o 3 room temperature no 2 Sensor and preparation method

A non-metallic mineral, substrate surface technology, applied in nanotechnology for materials and surface science, nanotechnology for sensing, nanotechnology, etc., can solve the problems of single, slow recovery, complex preparation methods, etc. , to achieve the effect of reducing production cost, increasing density and simple synthesis process
CN110261445BActive Publication Date: 2020-05-29NORTHEASTERN UNIV LIAONING
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Patents(China)
Current Assignee / Owner
NORTHEASTERN UNIV LIAONING
Publication Date
2020-05-29

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Abstract

The invention discloses a method for in-situ growth of nanometer In based on the surface of a non-metallic mineral electrode substrate. 2 O 3 room temperature NO 2 A sensor and a preparation method belong to the field of gas sensors of metal oxide semiconductor materials. The invention uses a non-metallic mineral porous ceramic electrode as a substrate, uses a DC sputtering method to sputter interdigital electrodes on the surface of the substrate, and uses a hydrothermal method to grow In in situ on its surface. 2 O 3 Nanomaterials, the In 2 O 3 The nanomaterial has a rod-like structure and is evenly and densely distributed on the surface of the substrate. Its diameter is 120~200nm and its length is 0.5~1μm. The rod-like structure is composed of nanoparticles stacked on each other. The nanoparticles are In 2 O 3 Cubic phase crystal structure, its diameter is 10~30nm. This gas sensor can detect 0.1~1ppm NO under room temperature working conditions and with UV light-assisted recovery. 2 It has fast response and recovery speed, excellent selectivity and long-term stability, and has good application prospects.
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Description

technical field

[0001] The invention belongs to the technical field of gas sensors of metal oxide semiconductor materials, in particular to a nano-In 2 o 3 Gas sensor and its preparation method, especially related to a kind of in-situ growth nano In on the surface of non-metallic mineral electrode substrate 2 o 3 room temperature NO 2 Sensors and methods of preparation. Background technique

[0002] Nitrogen dioxide (NO 2 ) is a toxic and irritating gas emitted from automobile exhaust and industrial production processes, and is one of the main substances that form acid rain and photochemical smog pollution. Even 1ppm of NO 2 It will also cause great harm to the human body, so for low concentrations of NO 2 detection is extremely necessary. Metal oxide semiconductor gas sensors have been widely used in the detection of toxic and harmful gases because of their high sensitivity, online real-time monitoring, miniaturization, easy integration, and strong portability. Curr...

Claims

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