A kind of barium titanate-strontium ruthenate nanocomposite film material and preparation method thereof

A nano-composite, thin-film material technology, applied in metal material coating process, superimposed layer plating, vacuum evaporation plating and other directions, can solve the problems of reduced insulation, large leakage current, lack of ferroelectric properties, etc. The effect of good electrical performance, simple process and broad application prospects

Active Publication Date: 2021-09-21
SHENYANG POLYTECHNIC UNIV
View PDF2 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In general, adding a second phase with metal conductivity to ferroelectric materials, such as strontium ruthenate, will generate a relatively large leakage current due to the decrease in the insulation of ferroelectric materials, so it does not have good ferroelectric properties.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A kind of barium titanate-strontium ruthenate nanocomposite film material and preparation method thereof
  • A kind of barium titanate-strontium ruthenate nanocomposite film material and preparation method thereof
  • A kind of barium titanate-strontium ruthenate nanocomposite film material and preparation method thereof

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0032] Contains 2vol% SrRuO 3 Barium titanate-strontium ruthenate nanocomposite film

[0033] (1) Nb:SrTiO 3 (001) The substrate is ultrasonically cleaned in acetone and alcohol for 20 minutes, then heated to 750° C. in vacuum, and annealed for 30 minutes;

[0034] (2) Using the pulsed laser deposition method at a temperature of 750°C and an oxygen pressure of 15Pa, on Nb:SrTiO 3 (001) Deposit strontium ruthenate for 2 seconds on the substrate, then deposit barium titanate for 24 seconds;

[0035] (3) The above process was repeated 40 times to prepare a barium titanate-strontium ruthenate nanocomposite film material with a thickness of 380 nm. The material has a crystal orientation of (001) plane, where, SrRuO 3 The volume ratio of the nanocomposite film is 2vol%, and the particles of nanometer size are uniformly distributed on the barium titanate substrate (see image 3 ). The remanent polarization of the film material is 14.1μC / cm 2 , the saturation polarization is 27...

Embodiment 2

[0037] Contains 4vol% SrRuO 3Barium titanate-strontium ruthenate nanocomposite film

[0038] (1) Using Nb:SrTiO 3 (001) Substrate. Microwave ultrasonically the substrate in acetone and alcohol for 20 minutes, then heat the substrate to 750°C in vacuum and keep it warm for 30 minutes;

[0039] (2) Using the pulsed laser deposition method at a temperature of 750°C and an oxygen pressure of 15Pa, the Nb:SrTiO 3 (001) Deposit strontium ruthenate for 4 seconds on the substrate, then deposit barium titanate for 23 seconds;

[0040] (3) The above process was repeated 40 times to prepare a barium titanate-strontium ruthenate nanocomposite film material with a thickness of 380 nm. The material has a crystal orientation of the (001) plane (see figure 1 ), among them, SrRuO 3 The volume ratio of the nanocomposite film is 4vol%, and the particles of nanometer size are uniformly distributed on the barium titanate substrate (see image 3 ). The remanent polarization of the film mate...

Embodiment 3

[0042] Contains 9vol% SrRuO 3 Barium titanate-strontium ruthenate nanocomposite film

[0043] (1) Using Nb:SrTiO 3 (001) Substrate. Microwave ultrasonically the substrate in acetone and alcohol for 20 minutes, then heat the substrate to 750°C in vacuum and keep it warm for 30 minutes;

[0044] (2) Using the pulsed laser deposition method at a temperature of 750°C and an oxygen pressure of 15Pa, the Nb:SrTiO 3 (001) Deposit strontium ruthenate for 9 seconds on the substrate, then deposit barium titanate for 22 seconds;

[0045] (3) The above process was repeated 40 times to prepare a barium titanate-strontium ruthenate nanocomposite film material with a thickness of 380 nm. The material has a crystal orientation of the (001) plane (see figure 1 ), among them, SrRuO 3 The volume ratio of the nanocomposite film is 9vol%, and its nanoparticles are evenly distributed on the barium titanate matrix (see figure 2 ). The remanent polarization of the film material is 40.3μC / cm ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

PropertyMeasurementUnit
remanent polarizationaaaaaaaaaa
thicknessaaaaaaaaaa
thicknessaaaaaaaaaa
Login to view more

Abstract

The invention provides a barium titanate-strontium ruthenate nanocomposite film material and a preparation method thereof, wherein the volume ratio of the material composition is SrRuO 3 :2~9%, BaTiO 3 :91~98%, the material microstructure is characterized by SrRuO 3 Nanoparticles are uniformly distributed in BaTiO 3 on the substrate. The advantages of the barium titanate-strontium ruthenate nanocomposite film material of the present invention are: the dielectric constant increases by 10% to 24% compared with the pure barium titanate film; and it has good ferroelectric polarization performance, and its remanent polarization Reach 40.3μC / cm 2 , the saturation polarization reaches 47.8μC / cm 2 , Compared with the barium titanate thin film, the remnant polarization increased by 950%, and the saturated polarization increased by 140%. As a lead-free ferroelectric material, the composite thin film has broad application prospects in integrated ferroelectric devices such as ferroelectric random access memories, thin film capacitors, sensors and actuators.

Description

technical field [0001] The invention belongs to the fields of electronic information materials, functional materials and intelligent materials, and specifically relates to a barium titanate-strontium ruthenate nanocomposite film material and a preparation method thereof. Background technique [0002] Ferroelectric thin films have excellent electrical properties such as ferroelectricity, piezoelectricity, dielectricity and optoelectronics, and are widely used in integrated ferroelectric devices such as data storage, crystal field effect transistors, surface acoustic wave devices, sensors and actuators. At present, the commonly used ferroelectric material is lead zirconate titanate (Pb(Zr x Ti 1-x )O 3 , referred to as PZT) is a representative lead-based oxide ceramic material, in which the PbO content accounts for about 70% of the total raw materials. There is a risk of serious pollution to the ecological environment during the production, use and disposal of lead-based fe...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): C23C14/08C23C14/28
CPCC23C14/08C23C14/088C23C14/28C23C28/04
Inventor 王占杰
Owner SHENYANG POLYTECHNIC UNIV
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap