Fabrication method of surface relief grating structure

Abstract

The invention provides a manufacturing method of a surface relief grating structure. The method for producing a surface relief grating structure of the present invention includes the production of a grating master and the transfer of the grating structure. During the production of the grating master, a film coating process of the master is added, and a metal film layer whose etching rate is different from that of the substrate is selected. During the etching process of the master plate, the power of the ion beam can be controlled to achieve the effect of precisely controlling the etching depth of the substrate substrate; at the same time, the angle between the emission line of the ion beam and the end face of the developed substrate substrate is not a right angle , so that the etched groove surface forms an inclined groove surface, so as to achieve a grating motherboard with trapezoidal slits. The ion beam etching of the invention has high efficiency, is suitable for large-area processing and mass production, and is widely used. Compared with the laser direct writing method, pre-confirmed ion beam etching parameters are set, one-time molding, high efficiency and high controllability, the target grating structure can better meet the size requirements, and the operation is simpler.

Description

【Technical field】 [0001] The invention relates to the field of grating production, in particular to a method for making a surface relief grating structure. 【Background technique】 [0002] Gratings are important components of various spectral analysis instruments, and are increasingly used in emerging fields such as metrology, imaging, information processing, inherited optics, and optical communications. In recent years, with the rapid development of semiconductor technology, a new type of optical application products has also developed, which is AR (Augmented Reality) products. AR is an augmentation of reality, a fusion of virtual images and real images. At present, head-mounted AR devices on the market mostly use the principle of optical projection, that is, the fusion of real scenes and virtual scenes is realized through lenses installed in front of the eyes. Among them, the Hololens product launched by Microsoft is currently on the market and has the best experience. I...

AI Technical Summary

Problems solved by technology

[0005] But the biggest problem with laser direct writing is that it cannot precisely control the contour depth

The processed contour depth is related to many factors such as exposure intensity, scanning speed, resist material, developing formula, ambient temperature and developing temperature. Constant working conditions to control depth error, low working efficiency and low controllability

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