The invention provides a manufacturing method of a surface embossment
grating structure. The manufacturing method of a surface embossment
grating structure comprises a
grating mother board manufacturing process and a grating structure transferring process. In the grating mother board manufacturing process, a mother board
coating process is added, and a
metal film layer with the
etching rate different from that of a substrate base material is selected. In the mother board
etching process, the power of an
ion beam can be controlled, and therefore, the
etching depth of the substrate base materialcan be accurately controlled. The included angle between the emission line of the
ion beam and one end surface of the developed substrate base material is not a right angle, so that the etching groove surface is inclined, and a grating mother board with a trapezoidal crack is obtained. The method has high
ion beam etching efficiency, is suitable for large-area
processing and
mass production, andis widely applied. Compared with a
laser direct writing method,
ion beam etching parameters confirmed in advance are set, one-time forming is achieved, efficiency and
controllability are high, the target grating structure can better meet the size requirement, and the operation is simpler.