Method for improving infrared band transmittance by processing micro-nano structure on surface of chalcogenide glass

Abstract

The invention relates to a method for improving infrared band transmittance by processing a micro-nano structure on a surface of chalcogenide glass, and belongs to the technical field of infrared optical glass processing and application. According to the method, the micro-nano structure with a proper refractive index is directly manufactured on the surface of the chalcogenide glass, introduction of a new film material is avoided, and problems that a multi-layer film material is limited and quality of a film layer is poor in a traditional infrared antireflection film plating process are solved;reactive ion etching adopted in the method is mainly based on a chemical reaction of a gas and the chalcogenide glass, does not generate any effect on a part covered by a polymer coating, avoids generation of a stress, is performed at a normal temperature and in a vacuum state, and does not generate gasification and leakage of toxic components; and according to the method, micro-nano structure pattern impressing of a non-planar surface can be achieved, a category of large-area micro-nano machining optical elements is expanded, and efficient antireflection of the chalcogenide glass in all infrared wave bands can be achieved by changing a target graphic structure and technological parameters.

Description

technical field [0001] The invention specifically relates to a method for processing three-dimensionally arranged micro-nano structures on the surface of chalcogenide glass to improve the transmittance in the infrared band, and belongs to the technical field of infrared optical glass processing and application. Background technique [0002] Chalcogenide glass is a binary or ternary compound glass composed of sulfur, selenium, tellurium and other glass network bodies (such as arsenic, antimony, germanium, etc.). In the 1950s and 1960s, arsenic sulfide glass was mass-produced by several companies in the United States, the United Kingdom, and Europe, and was used as a mid-infrared window material of 3 μm to 5 μm. At the same time, the concept and technology of infrared thermal imaging gradually emerged, making people shift the focus to the research of chalcogenide glass that transmits longer wavelength bands. Afterwards, selenide and telluride chalcogenide glasses, which can t...

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Problems solved by technology

Although this microstructure processing method can realize microstructure processing on the surface of chalcogenide glass, it also has disadvantages: using mechanical stamping, the hardness of the template is higher than that of chalcogenide glass, and deformation and stress will occur on the entire processed surface; It is necessary to heat the chalcogenide glass above its glass transition temperature, and the molding process is carried out at high temperature; the components of the chalcogenide glass must be low-toxic or non-toxic to prevent the volatilization of toxic components at high temperatures; this processing method is only suitable for the chalcogenide Glass flat sheet; because it is a successful stamping, the parameters of the microstructure are fixed, and the morphology of the microstructure cannot be controlled by changing parameters such as etching time like etching; it is suitable for simple linear structures, not suitable for smaller and more complex ones. three-dimensional structure

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