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Full-flexible pyroelectric infrared detector

A pyroelectric infrared detector technology, which is applied to electrical radiation detectors, instruments, measuring devices, etc., can solve the problems of inflexibility, difficult integration of infrared detectors, and reduced application prospects of pyroelectric infrared detectors.

Pending Publication Date: 2020-08-04
成都众芯科技有限公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The emergence of choppers makes it difficult to integrate, miniaturize and flexibly based on pyroelectric effect infrared detectors, which greatly reduces the application prospects of pyroelectric infrared detectors in flexible electronics and portable devices. It is Necessary to Develop a Fully Flexible Pyroelectric Infrared Detector Without Mechanical Chopper

Method used

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Embodiment 1

[0035] Such as Figure 1~4 As shown, a fully flexible pyroelectric infrared detector provided in this embodiment includes a flexible infrared radiation modulation mechanism and a flexible infrared pyroelectric sensitive unit, and the flexible infrared pyroelectric sensitive unit includes sequentially arranged from top to bottom The insulating layer 20, the upper electrode layer 12, the pyroelectric sensitive film 11 and the lower electrode layer 13; the flexible infrared radiation modulation mechanism is installed on the insulating layer 20, and the flexible infrared radiation modulation mechanism includes 1 or 2 The support column 31 and the metal film 32, the metal film 32 is installed on the support column 31 to form a single-ended or double-ended cantilever beam; the metal film 32 of the cantilever beam and the upper electrode of the flexible infrared pyroelectric sensitive unit pass through the circuit switch 42 A voltage source 41 is connected, and the circuit switch 42 ...

Embodiment 2

[0043] Such as Figure 5 As shown, a method for manufacturing a fully flexible pyroelectric infrared detector provided in this embodiment includes the following steps:

[0044] Step 1: Sputtering a nickel-chromium alloy thin film with a thickness of 1 μm on the base 51 prepared from a silicon wafer as the sacrificial layer 52 .

[0045] Step 2: The flexible pyroelectric polymer is completely dissolved into a solution, and then the solution is evenly covered on the sacrificial layer 52 of the base 51, and then placed in a constant temperature oven and baked until the solvent is completely volatilized, and the flexible pyroelectric polymer is formed Pyroelectric sensitive film 11.

[0046] Step 3: On the upper surface of the pyroelectric sensitive film 11, 100 nm of metal aluminum is prepared by sputtering as the upper electrode layer 12 of the flexible infrared pyroelectric sensitive unit.

[0047] Step 4: Prepare a 200 nm silicon nitride dielectric thin film as the insulatin...

Embodiment 3

[0055] Such as Figure 4 As shown, this embodiment provides a method for manufacturing a fully flexible pyroelectric infrared detector, comprising the following steps:

[0056] Step 1: Sputtering a nickel-chromium alloy thin film with a thickness of 1 μm on the base 51 prepared from a silicon wafer as the sacrificial layer 52 .

[0057] Step 2: The flexible pyroelectric polymer is completely dissolved into a solution, and then the solution is evenly covered on the sacrificial layer 52 of the base 51, and then placed in a constant temperature oven and baked until the solvent is completely volatilized, and the flexible pyroelectric polymer is formed Pyroelectric sensitive film 11.

[0058] Step 3: On the upper surface of the pyroelectric sensitive film 11, 100 nm of metal aluminum is prepared by sputtering as the upper electrode layer 12 of the flexible infrared pyroelectric sensitive unit.

[0059] Step 4: Prepare a 200 nm silicon nitride dielectric thin film as the insulatin...

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Abstract

The invention discloses a full-flexible pyroelectric infrared detector, and relates to the field of pyroelectric sensor structure design. The full-flexible pyroelectric infrared detector comprises a flexible infrared radiation modulation mechanism and a flexible infrared sensitive unit. The flexible infrared radiation modulation mechanism is a single-end or double-end supporting metal film cantilever beam. A voltage signal with a certain frequency is applied between a cantilever beam and the upper electrode layer of the flexible infrared sensitive unit, and the cantilever beam can move up anddown within a certain range according to the corresponding frequency so that the cantilever beam is periodically separated from and contacted with the upper surface of the flexible infrared sensitiveunit, and infrared radiation modulation is realized. The problem that integration and flexibility are difficult to achieve due to the fact that an existing pyroelectric infrared detector adopts a mechanical chopper is solved, and the pyroelectric infrared detector can be applied to wearable electronic equipment such as a flexible temperature sensor and a flexible thermal infrared imager.

Description

technical field [0001] The invention relates to the field of structural design of pyroelectric detectors, in particular to a fully flexible pyroelectric infrared detector. Background technique [0002] Pyroelectric infrared detector is a heat-sensitive infrared detector made of the effect that the spontaneous polarization of pyroelectric materials changes with temperature. Traditional pyroelectric infrared detectors use rigid ferroelectric ceramics or Ferroelectric crystals, the existing flexible pyroelectric infrared detectors based on ferroelectric polymers have the advantages of light weight, flexibility, impact resistance, corrosion resistance, and easy processing, and have great potential in fields that require high device portability. Good application prospects. [0003] However, the working principle of the pyroelectric infrared detector determines that it can only respond to changing temperature signals. Therefore, in order to detect static targets, a mechanical cho...

Claims

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Application Information

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IPC IPC(8): G01J5/34G01V8/10B81C1/00
CPCG01J5/34G01V8/10B81C1/0038B81C1/0015G01J2005/345
Inventor 黎威志张靖新袁志华张希仁游延军
Owner 成都众芯科技有限公司
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